Toru Sato

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment apparatus
- Patent number 8,033,288
- Issue date Oct 11, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Akio Shiomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 5,611,685
- Issue date Mar 18, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for heat processing a substrate
- Patent number 5,405,446
- Issue date Apr 11, 1995
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20080216880
- Publication date Sep 11, 2008
- Akio Shiomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS OF LIGHT EMISSION TYPE
- Publication number 20080017114
- Publication date Jan 24, 2008
- Jun WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for processing substrate in chamber and maintenance metho...
- Publication number 20050051102
- Publication date Mar 10, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Toru Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...