Toru SHIMIZU

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical measurement cell and optical analysis device
- Patent number 11,892,395
- Issue date Feb 6, 2024
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- G01 - MEASURING TESTING
Information Patent Grant
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
- Patent number 11,796,460
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Yuichi Furuya
- G01 - MEASURING TESTING
Information Patent Grant
Vaporization system and concentration control module used in the same
- Patent number 11,698,649
- Issue date Jul 11, 2023
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control apparatus, source consumption quantity estima...
- Patent number 11,631,596
- Issue date Apr 18, 2023
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vaporization device, film formation device, program for a concentra...
- Patent number 11,519,070
- Issue date Dec 6, 2022
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light absorbance analysis apparatus and program record medium for r...
- Patent number 11,493,443
- Issue date Nov 8, 2022
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- G01 - MEASURING TESTING
Information Patent Grant
Concentration control apparatus, zero point adjustment method, and...
- Patent number 11,365,480
- Issue date Jun 21, 2022
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration controller, gas control system, deposition apparatus,...
- Patent number 11,225,719
- Issue date Jan 18, 2022
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Absorption spectroscopic system, program recording medium for an ab...
- Patent number 11,226,235
- Issue date Jan 18, 2022
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- G01 - MEASURING TESTING
Information Patent Grant
Concentration control apparatus and material gas supply system
- Patent number 10,718,050
- Issue date Jul 21, 2020
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas control system, deposition apparatus including gas control syst...
- Patent number 10,655,220
- Issue date May 19, 2020
- HORIBA STEC, Co., Ltd.
- Yuhei Sakaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measurement method and measurement apparatus
- Patent number 9,297,646
- Issue date Mar 29, 2016
- Canon Kabushiki Kaisha
- Yasunori Furukawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL MEASUREMENT CELL, OPTICAL ANALYZER, WINDOW FORMING MEMBER,...
- Publication number 20230228679
- Publication date Jul 20, 2023
- Horiba Stec, Co., Ltd.
- Yoshiaki NAKATA
- G01 - MEASURING TESTING
Information Patent Application
Absorbance analysis apparatus for DCR gas, absorbance analysis meth...
- Publication number 20220307977
- Publication date Sep 29, 2022
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL MEASUREMENT CELL AND OPTICAL ANALYSIS DEVICE
- Publication number 20220099561
- Publication date Mar 31, 2022
- HORIBA STEC, CO., LTD.
- Toru SHIMIZU
- G01 - MEASURING TESTING
Information Patent Application
VAPORIZATION SYSTEM AND CONCENTRATION CONTROL MODULE USED IN THE SAME
- Publication number 20220066481
- Publication date Mar 3, 2022
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- G05 - CONTROLLING REGULATING
Information Patent Application
ABSORPTION SPECTROSCOPIC SYSTEM, PROGRAM RECORDING MEDIUM FOR AN AB...
- Publication number 20200355551
- Publication date Nov 12, 2020
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- G01 - MEASURING TESTING
Information Patent Application
LIGHT ABSORBANCE ANALYSIS APPARATUS AND PROGRAM RECORD MEDIUM FOR R...
- Publication number 20200340918
- Publication date Oct 29, 2020
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- G01 - MEASURING TESTING
Information Patent Application
CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMA...
- Publication number 20200294820
- Publication date Sep 17, 2020
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZATION DEVICE, FILM FORMATION DEVICE, PROGRAM FOR A CONCENTRA...
- Publication number 20200255944
- Publication date Aug 13, 2020
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRATION CONTROL APPARATUS, ZERO POINT ADJUSTMENT METHOD, AND...
- Publication number 20200240015
- Publication date Jul 30, 2020
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRATION CONTROLLER, GAS CONTROL SYSTEM, DEPOSITION APPARATUS,...
- Publication number 20190177850
- Publication date Jun 13, 2019
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRATION CONTROL APPARATUS AND MATERIAL GAS SUPPLY SYSTEM
- Publication number 20190085444
- Publication date Mar 21, 2019
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CONTROL SYSTEM, DEPOSITION APPARATUS INCLUDING GAS CONTROL SYST...
- Publication number 20180258530
- Publication date Sep 13, 2018
- HORIBA STEC, CO., LTD.
- Yuhei Sakaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASUREMENT METHOD AND MEASUREMENT APPARATUS
- Publication number 20120158357
- Publication date Jun 21, 2012
- Canon Kabushiki Kaisha
- Yasunori FURUKAWA
- G01 - MEASURING TESTING

Toru SHIMIZU

Person

Patents Grantslast 30 patents

Optical measurement cell and optical analysis device

Absorbance analysis apparatus for DCR gas, absorbance analysis meth...

Vaporization system and concentration control module used in the same

Concentration control apparatus, source consumption quantity estima...

Vaporization device, film formation device, program for a concentra...

Light absorbance analysis apparatus and program record medium for r...

Concentration control apparatus, zero point adjustment method, and...

Concentration controller, gas control system, deposition apparatus,...

Absorption spectroscopic system, program recording medium for an ab...

Concentration control apparatus and material gas supply system

Gas control system, deposition apparatus including gas control syst...

Measurement method and measurement apparatus

Patents Applicationslast 30 patents

OPTICAL MEASUREMENT CELL, OPTICAL ANALYZER, WINDOW FORMING MEMBER,...

Absorbance analysis apparatus for DCR gas, absorbance analysis meth...

OPTICAL MEASUREMENT CELL AND OPTICAL ANALYSIS DEVICE

VAPORIZATION SYSTEM AND CONCENTRATION CONTROL MODULE USED IN THE SAME

ABSORPTION SPECTROSCOPIC SYSTEM, PROGRAM RECORDING MEDIUM FOR AN AB...

LIGHT ABSORBANCE ANALYSIS APPARATUS AND PROGRAM RECORD MEDIUM FOR R...

CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMA...

VAPORIZATION DEVICE, FILM FORMATION DEVICE, PROGRAM FOR A CONCENTRA...

CONCENTRATION CONTROL APPARATUS, ZERO POINT ADJUSTMENT METHOD, AND...

CONCENTRATION CONTROLLER, GAS CONTROL SYSTEM, DEPOSITION APPARATUS,...

CONCENTRATION CONTROL APPARATUS AND MATERIAL GAS SUPPLY SYSTEM

GAS CONTROL SYSTEM, DEPOSITION APPARATUS INCLUDING GAS CONTROL SYST...

MEASUREMENT METHOD AND MEASUREMENT APPARATUS