TREA

Toru Shirasaki

Follow

Person

  • Gunma-ken, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Container for storing a pellicle for lithography
    • Patent number 10,634,991
    • Issue date Apr 28, 2020
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for EUV exposure
    • Patent number 10,088,745
    • Issue date Oct 2, 2018
    • Shin-Etsu Chemical Co., Ltd.
    • Akinori Nishimura
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle
    • Patent number 9,817,308
    • Issue date Nov 14, 2017
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithogrpahy
    • Patent number 9,268,213
    • Issue date Feb 23, 2016
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithography
    • Patent number 8,722,285
    • Issue date May 13, 2014
    • Shin-Etsu Chemical Co., Ltd.
    • Junichi Tsukada
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithography
    • Patent number 8,652,711
    • Issue date Feb 18, 2014
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle, mounting method therefor, pellicle-equipped mask, and mask
    • Patent number 8,582,077
    • Issue date Nov 12, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle frame and lithographic pellicle
    • Patent number 8,467,035
    • Issue date Jun 18, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithography
    • Patent number 8,426,083
    • Issue date Apr 23, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithography
    • Patent number 8,426,084
    • Issue date Apr 23, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Lithographic pellicle
    • Patent number 8,394,557
    • Issue date Mar 12, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithography and method for manufacturing pellicle film
    • Patent number 8,383,297
    • Issue date Feb 26, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle handling tool
    • Patent number 8,356,849
    • Issue date Jan 22, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Pellicle for lithography
    • Patent number 8,349,526
    • Issue date Jan 8, 2013
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithography
    • Patent number 8,309,279
    • Issue date Nov 13, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for lithography and a method for making the same
    • Patent number 8,293,433
    • Issue date Oct 23, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Junichi Tsukada
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle frame and lithographic pellicle
    • Patent number 8,221,944
    • Issue date Jul 17, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle frame and lithographic pellicle
    • Patent number 8,221,945
    • Issue date Jul 17, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle
    • Patent number 8,173,330
    • Issue date May 8, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle frame
    • Patent number 7,968,252
    • Issue date Jun 28, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Lithographic pellicle
    • Patent number 7,914,952
    • Issue date Mar 29, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for photolithography
    • Patent number 7,901,841
    • Issue date Mar 8, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle, photomask, pellicle frame, and method for manufacturing p...
    • Patent number 6,977,126
    • Issue date Dec 20, 2005
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Optical device and method for producing optical device
    • Patent number 6,806,990
    • Issue date Oct 19, 2004
    • Shin-Etsu Chemical Co., Ltd.
    • Hiroki Yoshikawa
    • C03 - GLASS MINERAL OR SLAG WOOL
  • Information Patent Grant

    Framed pellicle for protection of photolithographic photomask
    • Patent number 6,803,161
    • Issue date Oct 12, 2004
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Light exposure method, light exposure apparatus, pellicle and metho...
    • Patent number 6,639,650
    • Issue date Oct 28, 2003
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Framed pellicle for protection of photolithographic photomask
    • Patent number 6,593,034
    • Issue date Jul 15, 2003
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle for photolithography
    • Patent number 6,368,683
    • Issue date Apr 9, 2002
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Frame-supported pellicle for dustproof protection of photomask in p...
    • Patent number 5,693,382
    • Issue date Dec 2, 1997
    • Shin-Etsu Chemical Co., Ltd.
    • Yuichi Hamada
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Frame-supported pellicle for dustproof protection of photomask
    • Patent number 5,616,927
    • Issue date Apr 1, 1997
    • Shin-Etsu Chemical Co., Ltd.
    • Yoshihiro Kubota
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    Pellicle Frame Laminate and Method for Manufacturing Pellicle Using...
    • Publication number 20240192586
    • Publication date Jun 13, 2024
    • Shin-Etsu Chemical Co., Ltd.
    • Yu Yanase
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR EUV EXPOSURE
    • Publication number 20170184955
    • Publication date Jun 29, 2017
    • Shin-Etsu Chemical Co., Ltd.
    • Nishimura Akinori
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE
    • Publication number 20160291460
    • Publication date Oct 6, 2016
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    CONTAINER FOR STORING A PELLICLE FOR LITHOGRAPHY
    • Publication number 20160178998
    • Publication date Jun 23, 2016
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR LITHOGRPAHY
    • Publication number 20140178805
    • Publication date Jun 26, 2014
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR LITHOGRAPHY
    • Publication number 20120276473
    • Publication date Nov 1, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Junichi Tsukada
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR LITHOGRAPHY
    • Publication number 20120244477
    • Publication date Sep 27, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Pellicle for lithography
    • Publication number 20120122024
    • Publication date May 17, 2012
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE, MOUNTING METHOD THEREFOR, PELLICLE-EQUIPPED MASK, AND MASK
    • Publication number 20110235016
    • Publication date Sep 29, 2011
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Pellicle for lithography
    • Publication number 20110236807
    • Publication date Sep 29, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE HANDLING TOOL
    • Publication number 20110215602
    • Publication date Sep 8, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    PELLICLE FOR LITHOGRAPHY AND METHOD FOR MANUFACTURING PELLICLE FILM
    • Publication number 20110207030
    • Publication date Aug 25, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Pellicle for lithography
    • Publication number 20110195350
    • Publication date Aug 11, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Pellicle for lithography
    • Publication number 20110195351
    • Publication date Aug 11, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LITHOGRAPHIC PELLICLE
    • Publication number 20110129766
    • Publication date Jun 2, 2011
    • SHIN-ETSU CHEMICAL CO., LTD.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR LITHOGRAPHY
    • Publication number 20110129767
    • Publication date Jun 2, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Pellicle for lithography and a method for making the same
    • Publication number 20110081604
    • Publication date Apr 7, 2011
    • SHIN-ETSU CHEMICAL CO., LTD.
    • Junichi Tsukada
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE
    • Publication number 20110081603
    • Publication date Apr 7, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE
    • Publication number 20110027700
    • Publication date Feb 3, 2011
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FRAME AND LITHOGRAPHIC PELLICLE
    • Publication number 20100328641
    • Publication date Dec 30, 2010
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FRAME AND LITHOGRAPHIC PELLICLE
    • Publication number 20100330466
    • Publication date Dec 30, 2010
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FRAME AND LITHOGRAPHIC PELLICLE
    • Publication number 20100330467
    • Publication date Dec 30, 2010
    • SHIN-ETSU CHEMICAL CO., LTD.,
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PHOTOMASK
    • Publication number 20100279212
    • Publication date Nov 4, 2010
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE
    • Publication number 20100273097
    • Publication date Oct 28, 2010
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PROCESS FOR PRODUCING PELLICLE, AND PELLICLE
    • Publication number 20100233591
    • Publication date Sep 16, 2010
    • Shin-Etsu Chemical Co., Ltd.
    • Toru SHIRASAKI
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FOR USE IN SEMICONDUCTOR LITHOGRAPHY
    • Publication number 20090286169
    • Publication date Nov 19, 2009
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE
    • Publication number 20090286170
    • Publication date Nov 19, 2009
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FRAME
    • Publication number 20090191470
    • Publication date Jul 30, 2009
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE FRAME
    • Publication number 20090068573
    • Publication date Mar 12, 2009
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LITHOGRAPHIC PELLICLE
    • Publication number 20090029269
    • Publication date Jan 29, 2009
    • Shin-Etsu Chemical Co., Ltd.
    • Toru Shirasaki
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY