Toru Takahama

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Amagasaki, JP

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Patents Grantslast 30 patents

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Semiconductor producing apparatus, and wafer vacuum chucking device...
- Patent number 5,976,260
- Issue date Nov 2, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Yoshimi Kinoshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor producing apparatus comprising wafer vacuum chucking...
- Patent number 5,534,073
- Issue date Jul 9, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Yoshimi Kinoshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming apparatus
- Patent number 4,986,214
- Issue date Jan 22, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Nobuyuki Zumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...