Toru Tatsumi

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Minato-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming thin film and apparatus for forming thin film
- Patent number 7,354,622
- Issue date Apr 8, 2008
- Tokyo Electron Limited
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for Forming Thin Film
- Publication number 20080134976
- Publication date Jun 12, 2008
- TOKYO ELECTRON LIMITED
- Hiroshi Shinriki
- C30 - CRYSTAL GROWTH
Information Patent Application
Vapor growth method for metal oxide dielectric film and pzt film
- Publication number 20040058492
- Publication date Mar 25, 2004
- Toru Tatsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor phase deposition method for metal oxide dielectric film
- Publication number 20030175425
- Publication date Sep 18, 2003
- Toru Tatsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...