Toru Tojo

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern inspecting method
- Patent number 7,590,277
- Issue date Sep 15, 2009
- Kabushiki Kaisha Toshiba
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,551,767
- Issue date Jun 23, 2009
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,526,119
- Issue date Apr 28, 2009
- Kabushiki Kaisha Toshiba
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method
- Patent number 7,522,276
- Issue date Apr 21, 2009
- Kabushiki Kaisha Toshiba
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting apparatus
- Patent number 7,508,526
- Issue date Mar 24, 2009
- Kabushiki Kaisha Toshiba
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,421,109
- Issue date Sep 2, 2008
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,415,149
- Issue date Aug 19, 2008
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection apparatus
- Patent number 7,372,560
- Issue date May 13, 2008
- Kabushiki Kaisha Toshiba
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and defect inspection method
- Patent number 7,359,546
- Issue date Apr 15, 2008
- Kabushiki Kaisha Toshiba
- Shinji Sugihara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspecting apparatus and defect inspection method
- Patent number 7,345,755
- Issue date Mar 18, 2008
- Kabushiki Kaisha Toshiba
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus having two sensors, method for inspecting an o...
- Patent number 7,304,730
- Issue date Dec 4, 2007
- Kabushiki Kaisha Toshiba
- Hiromu Inoue
- G01 - MEASURING TESTING
Information Patent Grant
Automatic focusing apparatus
- Patent number 7,123,345
- Issue date Oct 17, 2006
- Kabushiki Kaisha Toshiba
- Shinji Sugihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method
- Patent number 7,075,621
- Issue date Jul 11, 2006
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment apparatus for substrates
- Patent number 6,901,314
- Issue date May 31, 2005
- Kabushiki Kaisha Toshiba
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring method in pattern drawing apparatus
- Patent number 6,676,289
- Issue date Jan 13, 2004
- Kabushiki Kaisha Toshiba
- Ryoichi Hirano
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum processing apparatus and ion pump capable of suppressing lea...
- Patent number 6,411,023
- Issue date Jun 25, 2002
- Toshiba Machine Co., Ltd.
- Katsuhito Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern writing method
- Patent number 6,346,354
- Issue date Feb 12, 2002
- Kabushiki Kaisha Toshiba
- Takayuki Abe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sample transferring method and sample transfer supporting apparatus
- Patent number 6,281,510
- Issue date Aug 28, 2001
- Kabushiki Kaisha Toshiba
- Shusuke Yoshitake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for emitting a beam to a sample used for manufacturing a...
- Patent number 6,239,443
- Issue date May 29, 2001
- Kabushiki Kaisha Toshiba
- Toru Tojo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming apparatus
- Patent number 6,182,369
- Issue date Feb 6, 2001
- Kabushiki Kaisha Toshiba
- Ryoichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for inspecting slight defects on a photomask pattern
- Patent number 6,100,970
- Issue date Aug 8, 2000
- Kabushiki Kaisha Topcon
- Hisakazu Yoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sample transferring method and sample transfer supporting apparatus
- Patent number 6,090,176
- Issue date Jul 18, 2000
- Kabushiki Kaisha Toshiba
- Shusuke Yoshitake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical substrate inspection apparatus
- Patent number 6,084,716
- Issue date Jul 4, 2000
- Kabushiki Kaisha Toshiba
- Yasushi Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measuring apparatus
- Patent number 6,080,990
- Issue date Jun 27, 2000
- Kabushiki Kaisha Topcon
- Shinya Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sample inspection apparatus and sample inspection method
- Patent number 5,960,106
- Issue date Sep 28, 1999
- Kabushiki Kaisha Toshiba
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam exposure system
- Patent number 5,912,468
- Issue date Jun 15, 1999
- Kabushiki Kaisha Toshiba
- Ryoichi Hirano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sample inspection apparatus and sample inspection method
- Patent number 5,828,457
- Issue date Oct 27, 1998
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting slight defects in a photomask p...
- Patent number 5,812,259
- Issue date Sep 22, 1998
- Kabushiki Kaisha Topcon
- Hisakazu Yoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of inspecting a pattern formed on a sample for a defect, and...
- Patent number 5,744,381
- Issue date Apr 28, 1998
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern evaluation apparatus and a method of pattern evaluation
- Patent number 5,602,645
- Issue date Feb 11, 1997
- Kabushiki Kaisha Toshiba
- Mitsuo Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION APPARATUS
- Publication number 20080166054
- Publication date Jul 10, 2008
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION METHOD
- Publication number 20080151230
- Publication date Jun 26, 2008
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Application
Inspection apparatus having two sensors, method for inspecting an o...
- Publication number 20080030719
- Publication date Feb 7, 2008
- Hiromu Inoue
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION APPARATUS
- Publication number 20070127806
- Publication date Jun 7, 2007
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern defect inspection method and apparatus
- Publication number 20060239535
- Publication date Oct 26, 2006
- Kabushiki Kaisha TOPCON
- Akira Takada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect inspecting apparatus and defect inspection method
- Publication number 20060087649
- Publication date Apr 27, 2006
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Application
Defect inspecting apparatus
- Publication number 20060082782
- Publication date Apr 20, 2006
- Riki Ogawa
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspecting method
- Publication number 20060018530
- Publication date Jan 26, 2006
- Kabushiki Kaisha Toshiba
- Junji Oaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect inspection apparatus and defect inspection method
- Publication number 20050232477
- Publication date Oct 20, 2005
- Shinji Sugihara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Alignment method
- Publication number 20050128451
- Publication date Jun 16, 2005
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automatic focusing apparatus
- Publication number 20050052634
- Publication date Mar 10, 2005
- Shinji Sugihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection apparatus having two sensors, method for inspecting an o...
- Publication number 20050002020
- Publication date Jan 6, 2005
- Hiromu Inoue
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection apparatus
- Publication number 20040252296
- Publication date Dec 16, 2004
- Toru Tojo
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection apparatus
- Publication number 20040126003
- Publication date Jul 1, 2004
- Ikunao Isomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspection apparatus
- Publication number 20040105578
- Publication date Jun 3, 2004
- Hideo Tsuchiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Alignment apparatus for substrates
- Publication number 20030185664
- Publication date Oct 2, 2003
- Soichiro Mitsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature measuring method in pattern drawing apparatus
- Publication number 20020027945
- Publication date Mar 7, 2002
- Ryoichi Hirano
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Pattern inspecting method

Pattern inspection apparatus

Pattern inspection apparatus

Pattern inspection method

Defect inspecting apparatus

Pattern inspection apparatus

Pattern inspection apparatus

Pattern inspection apparatus

Defect inspection apparatus and defect inspection method

Defect inspecting apparatus and defect inspection method

Inspection apparatus having two sensors, method for inspecting an o...

Automatic focusing apparatus

Alignment method

Alignment apparatus for substrates

Temperature measuring method in pattern drawing apparatus

Vacuum processing apparatus and ion pump capable of suppressing lea...

Pattern writing method

Sample transferring method and sample transfer supporting apparatus

Apparatus for emitting a beam to a sample used for manufacturing a...

Pattern forming apparatus

Apparatus for inspecting slight defects on a photomask pattern

Sample transferring method and sample transfer supporting apparatus

Optical substrate inspection apparatus

Position measuring apparatus

Sample inspection apparatus and sample inspection method

Charged particle beam exposure system

Sample inspection apparatus and sample inspection method

Method and apparatus for inspecting slight defects in a photomask p...

Method of inspecting a pattern formed on a sample for a defect, and...

Pattern evaluation apparatus and a method of pattern evaluation

Patents Applicationslast 30 patents

PATTERN INSPECTION APPARATUS

PATTERN INSPECTION METHOD

Inspection apparatus having two sensors, method for inspecting an o...

PATTERN INSPECTION APPARATUS

Pattern defect inspection method and apparatus

Defect inspecting apparatus and defect inspection method

Defect inspecting apparatus

Pattern inspecting method

Defect inspection apparatus and defect inspection method

Alignment method

Automatic focusing apparatus

Inspection apparatus having two sensors, method for inspecting an o...

Pattern inspection apparatus

Pattern inspection apparatus

Pattern inspection apparatus

Alignment apparatus for substrates

Temperature measuring method in pattern drawing apparatus