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Toru YAMAUCHI
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Nirasaki City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Support information display method, maintenance support method of s...
Patent number
9,810,905
Issue date
Nov 7, 2017
Tokyo Electron Limited
Toshiaki Kodama
G02 - OPTICS
Information
Patent Grant
Alignment apparatus and substrate processing apparatus
Patent number
9,620,402
Issue date
Apr 11, 2017
Tokyo Electron Limited
Toshiaki Kodama
G05 - CONTROLLING REGULATING
Information
Patent Grant
Semiconductor manufacturing apparatus detecting state of connection...
Patent number
6,754,554
Issue date
Jun 22, 2004
Tokyo Electron Limited
Toru Yamauchi
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
JIG SUBSTRATE AND TEACHING METHOD
Publication number
20240355662
Publication date
Oct 24, 2024
TOKYO ELECTRON LIMITED
Hiromitsu SAKAUE
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
ALIGNMENT APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20160078626
Publication date
Mar 17, 2016
TOYO ELECTRON LIMITED
Toshiaki KODAMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...
Publication number
20140240484
Publication date
Aug 28, 2014
TOKYO ELECTRON LIMITED
Toshiaki KODAMA
G02 - OPTICS
Information
Patent Application
Semiconductor manufacturing apparatus detecting state of connection...
Publication number
20030182012
Publication date
Sep 25, 2003
Toru Yamauchi
G05 - CONTROLLING REGULATING