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Toru YAMAZAKI
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Utsunomiya-shi, JP
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last 30 patents
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Patent Grant
Drawing apparatus and method of manufacturing article
Patent number
8,476,606
Issue date
Jul 2, 2013
Canon Kabushiki Kaisha
Yoshihiro Hirata
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS, DRAWING DATA GENERATION ME...
Publication number
20130078577
Publication date
Mar 28, 2013
Canon Kabushiki Kaisha
Toru Yamazaki
B82 - NANO-TECHNOLOGY
Information
Patent Application
DEFLECTOR ARRAY, CHARGED PARTICLE BEAM DRAWING APPARATUS, DEVICE MA...
Publication number
20120115306
Publication date
May 10, 2012
Canon Kabushiki Kaisha
Toru Yamazaki
B82 - NANO-TECHNOLOGY
Information
Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20120015303
Publication date
Jan 19, 2012
Canon Kabushiki Kaisha
Yoshihiro HIRATA
B82 - NANO-TECHNOLOGY