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Toshiaki Fujisato
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Albany, NY, US
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last 30 patents
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Patent Application
APPARATUS FOR THERMAL AND PLASMA ENHANCED VAPOR DEPOSITION AND METH...
Publication number
20120315404
Publication date
Dec 13, 2012
TOKYO ELECTRON LIMITED
Yicheng Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
Publication number
20070116873
Publication date
May 24, 2007
TOKYO ELECTRON LIMITED
Yicheng Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for thermal and plasma enhanced vapor deposition and meth...
Publication number
20070116872
Publication date
May 24, 2007
TOKYO ELECTRON LIMITED
Yicheng Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...