Toshiaki Fujisato

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film-forming apparatus
- Patent number 11,466,365
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Daisuke Toriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of controlling substrate processing apparatus, and substrate...
- Patent number 11,441,224
- Issue date Sep 13, 2022
- Tokyo Electron Limited
- Daisuke Toriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holder and film forming apparatus
- Patent number 11,396,704
- Issue date Jul 26, 2022
- Tokyo Electron Limited
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Placement apparatus and processing apparatus
- Patent number 11,280,002
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Kohichi Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and cover member
- Patent number 11,104,991
- Issue date Aug 31, 2021
- Tokyo Electron Limited
- Takashi Kamio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate and substrate processing apparatus
- Patent number 10,998,204
- Issue date May 4, 2021
- Tokyo Electron Limited
- Takashi Mochizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium wiring and manufacturing method thereof
- Patent number 10,522,467
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mounting method and substrate mounting device
- Patent number 10,340,176
- Issue date Jul 2, 2019
- Tokyo Electron Limited
- Toshiaki Fujisato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table structure and plasma film forming apparatus
- Patent number 9,324,600
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,253,862
- Issue date Feb 2, 2016
- Tokyo Electron Limited
- Tatsuo Hirasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure and plasma film forming apparatus
- Patent number 8,592,712
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature electrostatic chuck and method of using
- Patent number 8,194,384
- Issue date Jun 5, 2012
- Tokyo Electron Limited
- Ronald Nasman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrode, susceptor, plasma processing apparatus and method of mak...
- Patent number 7,337,745
- Issue date Mar 4, 2008
- Tokyo Electron Limited
- Mitsuaki Komino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS
- Publication number 20210005493
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Toshiaki FUJISATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Controlling Substrate Processing Apparatus, and Substrate...
- Publication number 20200248306
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Daisuke TORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Holder and Film Forming Apparatus
- Publication number 20200165723
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Toshiaki FUJISATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Placement Apparatus and Processing Apparatus
- Publication number 20200095680
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Kohichi SATOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20200010956
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Daisuke TORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190355597
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Takashi MOCHIZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing Apparatus and Cover Member
- Publication number 20180112309
- Publication date Apr 26, 2018
- TOKYO ELECTRON LIMITED
- Takashi KAMIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING METHOD AND SUBSTRATE MOUNTING DEVICE
- Publication number 20180040503
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Toshiaki FUJISATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RUTHENIUM WIRING AND MANUFACTURING METHOD THEREOF
- Publication number 20180012844
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20140090597
- Publication date Apr 3, 2014
- TOKYO ELECTRON LIMITED
- Tatsuo HIRASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL...
- Publication number 20140060572
- Publication date Mar 6, 2014
- TOKYO ELECTRON LIMITED
- Chiaki YASUMURO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE STRUCTURE AND PLASMA FILM FORMING APPARATUS
- Publication number 20130001076
- Publication date Jan 3, 2013
- TOKYO ELECTRON LIMITED
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, RESPUTTERING METHOD, AND FILM FORMING APPARATUS
- Publication number 20120247949
- Publication date Oct 4, 2012
- Takashi SAKUMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOUNTING TABLE STRUCTURE AND PLASMA FILM FORMING APPARATUS
- Publication number 20100244350
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR RF GROUNDING OF IPVD TABLE
- Publication number 20090242383
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Mirko Vukovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Apparatus and Multi-Chamber System
- Publication number 20080087220
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus
- Publication number 20030141017
- Publication date Jul 31, 2003
- TOKYO ELECTRON LIMITED
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus, and cleaning method therefor
- Publication number 20030119328
- Publication date Jun 26, 2003
- TOKYO ELECTRON LIMITED
- Toshiaki Fujisato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Toshiaki Fujisato

Person

Patents Grantslast 30 patents

Film-forming apparatus

Method of controlling substrate processing apparatus, and substrate...

Substrate holder and film forming apparatus

Placement apparatus and processing apparatus

Processing apparatus and cover member

Method of processing substrate and substrate processing apparatus

Ruthenium wiring and manufacturing method thereof

Substrate mounting method and substrate mounting device

Mounting table structure and plasma film forming apparatus

Plasma processing method and plasma processing apparatus

Mounting table structure and plasma film forming apparatus

High temperature electrostatic chuck and method of using

Electrode, susceptor, plasma processing apparatus and method of mak...

Patents Applicationslast 30 patents

PROCESSING APPARATUS

Method of Controlling Substrate Processing Apparatus, and Substrate...

Substrate Holder and Film Forming Apparatus

Placement Apparatus and Processing Apparatus

FILM-FORMING APPARATUS

METHOD OF PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

Processing Apparatus and Cover Member

SUBSTRATE MOUNTING METHOD AND SUBSTRATE MOUNTING DEVICE

RUTHENIUM WIRING AND MANUFACTURING METHOD THEREOF

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL...

MOUNTING TABLE STRUCTURE AND PLASMA FILM FORMING APPARATUS

FILM FORMING METHOD, RESPUTTERING METHOD, AND FILM FORMING APPARATUS

MOUNTING TABLE STRUCTURE AND PLASMA FILM FORMING APPARATUS

APPARATUS AND METHOD FOR RF GROUNDING OF IPVD TABLE

Plasma Processing Apparatus and Multi-Chamber System

Plasma processing apparatus

Plasma processing apparatus, and cleaning method therefor