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Toshiaki Hato
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Kawasaki, JP
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last 30 patents
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Patent Grant
Method of forming pattern
Patent number
9,459,535
Issue date
Oct 4, 2016
Tokyo Ohka Kogyo Co., Ltd.
Naoto Motoike
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist composition and method of forming resist pattern
Patent number
9,244,349
Issue date
Jan 26, 2016
Tokyo Ohka Kogyo Co., Ltd.
Takayoshi Mori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition, compound, polymeric compound and method of form...
Patent number
9,244,347
Issue date
Jan 26, 2016
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
9,188,863
Issue date
Nov 17, 2015
Tokyo Ohka Kogyo Co., Ltd.
Yoshiyuki Utsumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
9,164,380
Issue date
Oct 20, 2015
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition, method of forming resist pattern and compound
Patent number
9,063,416
Issue date
Jun 23, 2015
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Sulfonium salt and photo-acid generator
Patent number
9,045,398
Issue date
Jun 2, 2015
San-Apro Limited
Issei Suzuki
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
8,785,106
Issue date
Jul 22, 2014
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
8,354,218
Issue date
Jan 15, 2013
Tokyo Ohka Kogyo Co., Ltd.
Isao Hirano
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
SULFONIUM SALT AND PHOTO-ACID GENERATOR
Publication number
20140357896
Publication date
Dec 4, 2014
SAN-APRO LTD.
Issei Suzuki
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPOSITION, COMPOUND, POLYMERIC COMPOUND AND METHOD OF FORM...
Publication number
20140356787
Publication date
Dec 4, 2014
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20130344435
Publication date
Dec 26, 2013
Yoshiyuki Utsumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20130224658
Publication date
Aug 29, 2013
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING PATTERN
Publication number
20130209941
Publication date
Aug 15, 2013
TOKYO ELECTRON LIMITED
Naoto Motoike
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20130189619
Publication date
Jul 25, 2013
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN AND COMPOUND
Publication number
20130157197
Publication date
Jun 20, 2013
Tokyo Ohka Kogyo Co., Ltd.
Yoshitaka Komuro
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20110039207
Publication date
Feb 17, 2011
Tokyo Ohka Kogyo Co., Ltd.
Isao HIRANO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20100310985
Publication date
Dec 9, 2010
Tokyo Ohka Kogyo Co., Ltd.
Takayoshi MORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY