Toshiaki Kodama

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus, substrate processing system and subst...
- Patent number 12,142,506
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting substrate, system for processing substra...
- Patent number 12,009,240
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate gripping determination method
- Patent number 11,923,222
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Toshiaki Kodama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transport apparatus, semiconductor manufacturing apparatus, and tra...
- Patent number 11,850,743
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer device, processing system, and transfer method
- Patent number 11,434,087
- Issue date Sep 6, 2022
- Tokyo Electron Limited
- Toshiaki Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate detection apparatus, substrate detection method and subst...
- Patent number 10,429,543
- Issue date Oct 1, 2019
- Tokyo Electron Limited
- Toshiaki Kodama
- G01 - MEASURING TESTING
Information Patent Grant
Substrate conveying method and substrate processing system
- Patent number 10,319,622
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Toshiaki Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support information display method, maintenance support method of s...
- Patent number 9,810,905
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Toshiaki Kodama
- G02 - OPTICS
Information Patent Grant
Posture holding device for holding part
- Patent number 9,776,321
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Toshiaki Kodama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Alignment apparatus and substrate processing apparatus
- Patent number 9,620,402
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Toshiaki Kodama
- G05 - CONTROLLING REGULATING
Information Patent Grant
Alignment apparatus
- Patent number 9,607,389
- Issue date Mar 28, 2017
- Tokyo Electron Limited
- Toshiaki Kodama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining substrate transportation path, substrate tra...
- Patent number 9,043,020
- Issue date May 26, 2015
- Tokyo Electron Limited
- Toshiaki Kodama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20240290645
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE AND EXPANSION AMOUNT CALCULATION METHOD
- Publication number 20240228190
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD
- Publication number 20240087936
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
- Publication number 20230170239
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE TRANSPORT METHOD
- Publication number 20220367223
- Publication date Nov 17, 2022
- TOKYO ELECTRON LIMITED
- Isamu TAODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNU...
- Publication number 20220365187
- Publication date Nov 17, 2022
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20220319889
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUBST...
- Publication number 20220199442
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Hiromitsu SAKAUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20220193897
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND STATE MONITORING METHOD
- Publication number 20220068672
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE GRIPPING DETERMINATION METHOD
- Publication number 20210366747
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD
- Publication number 20210253365
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Apparatus, Semiconductor Manufacturing Apparatus, and Tra...
- Publication number 20200094399
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE CONVEYING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170221748
- Publication date Aug 3, 2017
- TOKYO ELECTRON LIMITED
- Toshiaki Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSTURE HOLDING DEVICE FOR HOLDING PART
- Publication number 20170028547
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Substrate Detection Apparatus, Substrate Detection Method and Subst...
- Publication number 20160240412
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160078626
- Publication date Mar 17, 2016
- TOYO ELECTRON LIMITED
- Toshiaki KODAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ALIGNMENT APPARATUS
- Publication number 20160078612
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING SUBSTRATE TRANSPORTATION PATH, SUBSTRATE TRA...
- Publication number 20140249674
- Publication date Sep 4, 2014
- TOKYO ELECTRON LIMITED
- Toshiaki Kodama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...
- Publication number 20140240484
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G02 - OPTICS

Toshiaki Kodama

Person

Patents Grantslast 30 patents

Substrate transfer apparatus, substrate processing system and subst...

Apparatus for transporting substrate, system for processing substra...

Substrate transfer device and substrate gripping determination method

Transport apparatus, semiconductor manufacturing apparatus, and tra...

Transfer device, processing system, and transfer method

Substrate detection apparatus, substrate detection method and subst...

Substrate conveying method and substrate processing system

Support information display method, maintenance support method of s...

Posture holding device for holding part

Alignment apparatus and substrate processing apparatus

Alignment apparatus

Method for determining substrate transportation path, substrate tra...

Patents Applicationslast 30 patents

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

TRANSFER DEVICE AND EXPANSION AMOUNT CALCULATION METHOD

SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD

APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...

SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE TRANSPORT METHOD

SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNU...

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING SYSTEM AND SUBST...

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

SUBSTRATE PROCESSING SYSTEM AND STATE MONITORING METHOD

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE GRIPPING DETERMINATION METHOD

TRANSFER DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD

Transport Apparatus, Semiconductor Manufacturing Apparatus, and Tra...

SUBSTRATE CONVEYING METHOD AND SUBSTRATE PROCESSING SYSTEM

POSTURE HOLDING DEVICE FOR HOLDING PART

Substrate Detection Apparatus, Substrate Detection Method and Subst...

ALIGNMENT APPARATUS AND SUBSTRATE PROCESSING APPARATUS

ALIGNMENT APPARATUS

METHOD FOR DETERMINING SUBSTRATE TRANSPORTATION PATH, SUBSTRATE TRA...

SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...