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Toshiaki OTAKI
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern inspection apparatus and pattern inspection method
Patent number
10,719,928
Issue date
Jul 21, 2020
NuFlare Technology, Inc.
Toshiaki Otaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection apparatus for detecting a pattern defect
Patent number
10,386,308
Issue date
Aug 20, 2019
NuFlare Technology, Inc.
Toshiaki Otaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Focusing apparatus, focusing method, and pattern inspection method
Patent number
10,222,341
Issue date
Mar 5, 2019
NuFlare Technology, Inc.
Toshiaki Otaki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Illumination apparatus and pattern inspection apparatus
Patent number
9,410,899
Issue date
Aug 9, 2016
NuFlare Technology, Inc.
Toshiaki Otaki
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
9,036,143
Issue date
May 19, 2015
NuFlare Technology, Inc.
Yasuhiro Yamashita
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PATTERN INSPECTION APPARATUS
Publication number
20180024075
Publication date
Jan 25, 2018
NuFlare Technology, Inc.
Toshiaki OTAKI
G01 - MEASURING TESTING
Information
Patent Application
FOCUSING APPARATUS, FOCUSING METHOD, AND PATTERN INSPECTION METHOD
Publication number
20180003649
Publication date
Jan 4, 2018
NuFlare Technology, Inc.
Toshiaki OTAKI
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20170032507
Publication date
Feb 2, 2017
NuFlare Technology, Inc.
Toshiaki OTAKI
G02 - OPTICS
Information
Patent Application
ILLUMINATION APPARATUS AND PATTERN INSPECTION APPARATUS
Publication number
20150219568
Publication date
Aug 6, 2015
NuFlare Technology, Inc.
Toshiaki OTAKI
G02 - OPTICS
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20140307254
Publication date
Oct 16, 2014
NuFlare Technology, Inc.
Yasuhiro YAMASHITA
G01 - MEASURING TESTING