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Toshiaki SHIBATA
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Tokyo, JP
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last 30 patents
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Patent Grant
Cleaning liquid, cleaning method, and method for producing semicond...
Patent number
11,597,896
Issue date
Mar 7, 2023
Mitsubishi Chemical Corporation
Toshiaki Shibata
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Cleaning liquid, cleaning method, and method for producing semicond...
Patent number
11,149,231
Issue date
Oct 19, 2021
MITSUBISHI CHEMICAL CORPORATION
Ken Harada
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
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Patent Application
Cleaning Fluid, Method of Cleaning Semiconductor Wafer, and Method...
Publication number
20220028681
Publication date
Jan 27, 2022
MITSUBISHI CHEMICAL CORPORATION
Toshiaki Shibata
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
CLEANING LIQUID, CLEANING METHOD, AND METHOD FOR PRODUCING SEMICOND...
Publication number
20210171878
Publication date
Jun 10, 2021
MITSUBISHI CHEMICAL CORPORATION
Toshiaki SHIBATA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
CLEANING LIQUID, CLEANING METHOD, AND METHOD FOR PRODUCING SEMICOND...
Publication number
20200231900
Publication date
Jul 23, 2020
MITSUBISHI CHEMICAL CORPORATION
Ken HARADA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...