Toshiei Kurosaki

Person

Kodaira, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for inspecting defect and system therefor
- Patent number 7,558,683
- Issue date Jul 7, 2009
- Hitachi, Ltd.
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect image classifying method and apparatus and a semiconductor d...
- Patent number 7,356,177
- Issue date Apr 8, 2008
- Hitachi, Ltd.
- Kenji Obara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inspecting defect and system therefor
- Patent number 7,305,314
- Issue date Dec 4, 2007
- Hitachi, Ltd.
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect image classifying method and apparatus and a semiconductor d...
- Patent number 7,113,628
- Issue date Sep 26, 2006
- Hitachi
- Kenji Obara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inspecting defect and system therefor
- Patent number 7,010,447
- Issue date Mar 7, 2006
- Hitachi, Ltd.
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inspecting defect and system therefor
- Patent number 6,792,359
- Issue date Sep 14, 2004
- Hitachi, Ltd.
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope including apparatus for X-ray analysis and meth...
- Patent number 6,765,205
- Issue date Jul 20, 2004
- Hitachi High-Technologies Corporation
- Isao Ochiai
- G01 - MEASURING TESTING
Information Patent Grant
Method and its apparatus for inspecting a specimen
- Patent number 6,553,323
- Issue date Apr 22, 2003
- Hitachi, Ltd.
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope having magnification switching control
- Patent number 6,476,388
- Issue date Nov 5, 2002
- Hitachi, Ltd.
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Grant
Method of forming pattern and projection aligner for carrying out t...
- Patent number RE36731
- Issue date Jun 13, 2000
- Hitachi, Ltd.
- Hiroshi Fukuda
- 355 - Photocopying
Information Patent Grant
Charged particle beam apparatus
- Patent number 5,747,816
- Issue date May 5, 1998
- Hitachi, Ltd.
- Toshiei Kurosaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of detecting inclination of a specimen and a projection expo...
- Patent number 5,392,115
- Issue date Feb 21, 1995
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection type exposure method and apparatus
- Patent number 5,247,329
- Issue date Sep 21, 1993
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for detecting defect on photomask
- Patent number 5,235,400
- Issue date Aug 10, 1993
- Hitachi, Ltd.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monochromator
- Patent number 5,078,495
- Issue date Jan 7, 1992
- Hitachi, Ltd.
- Tatsuo Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method of forming pattern and projection aligner for carrying out t...
- Patent number 4,992,825
- Issue date Feb 12, 1991
- Hitachi, Ltd.
- Hiroshi Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spectrometer
- Patent number 4,983,039
- Issue date Jan 8, 1991
- Hitachi, Ltd.
- Tatsuo Harada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming pattern and projection aligner for carrying out t...
- Patent number 4,904,569
- Issue date Feb 27, 1990
- Hitachi, Ltd.
- Hiroshi Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming pattern and projection aligner for carrying out t...
- Patent number 4,869,999
- Issue date Sep 26, 1989
- Hitachi, Ltd.
- Hiroshi Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection printing apparatus wherein wafer mark has a grat...
- Patent number 4,857,744
- Issue date Aug 15, 1989
- Hitachi, Ltd.
- Keiji Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern printing method and apparatus
- Patent number 4,798,470
- Issue date Jan 17, 1989
- Hitachi, Ltd.
- Shigeo Moriyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern detector
- Patent number 4,614,432
- Issue date Sep 30, 1986
- Hitachi, Ltd.
- Shinji Kuniyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern detector
- Patent number 4,597,669
- Issue date Jul 1, 1986
- Hitachi, Ltd.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern generator
- Patent number 4,504,726
- Issue date Mar 12, 1985
- Hitachi, Ltd.
- Sumio Hosaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pattern forming apparatus
- Patent number 4,480,910
- Issue date Nov 6, 1984
- Hitachi, Ltd.
- Akihiro Takanashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automatic focusing apparatus
- Patent number 4,477,183
- Issue date Oct 16, 1984
- Hitachi, Ltd.
- Yoshio Kawamura
- G02 - OPTICS
Information Patent Grant
Pattern detecting apparatus
- Patent number 4,441,206
- Issue date Apr 3, 1984
- Hitachi, Ltd.
- Shinji Kuniyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduction projection aligner system
- Patent number 4,380,395
- Issue date Apr 19, 1983
- Hitachi, Ltd.
- Shinji Kuniyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Proportional linear output system
- Patent number 4,317,383
- Issue date Mar 2, 1982
- Hitachi, Ltd.
- Toshiei Kurosaki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Defect Image Classifying Method and Apparatus and a Semiconductor D...
- Publication number 20080187212
- Publication date Aug 7, 2008
- Hitachi, Ltd
- Kenji OBARA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for inspecting defect and system therefor
- Publication number 20080059083
- Publication date Mar 6, 2008
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect image classifying method and apparatus and a semiconductor d...
- Publication number 20060274933
- Publication date Dec 7, 2006
- Hitachi, Ltd
- Kenji Obara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for inspecting defect and system therefor
- Publication number 20060100804
- Publication date May 11, 2006
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for reviewing defects
- Publication number 20050122508
- Publication date Jun 9, 2005
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting defect and system therefor
- Publication number 20040260496
- Publication date Dec 23, 2004
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON MICROSCOPE INCLUDING APPARATUS FOR X-RAY ANALYSIS AND METH...
- Publication number 20040099805
- Publication date May 27, 2004
- Isao Ochiai
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting defect and system therefor
- Publication number 20020035435
- Publication date Mar 21, 2002
- Takanori Ninomiya
- G01 - MEASURING TESTING
Information Patent Application
Method for classifying defects and device for the same
- Publication number 20010042705
- Publication date Nov 22, 2001
- Ryou Nakagaki
- G01 - MEASURING TESTING

Toshiei Kurosaki

Person

Patents Grantslast 30 patents

Method for inspecting defect and system therefor

Defect image classifying method and apparatus and a semiconductor d...

Method for inspecting defect and system therefor

Defect image classifying method and apparatus and a semiconductor d...

Method for inspecting defect and system therefor

Method for inspecting defect and system therefor

Electron microscope including apparatus for X-ray analysis and meth...

Method and its apparatus for inspecting a specimen

Scanning electron microscope having magnification switching control

Method of forming pattern and projection aligner for carrying out t...

Charged particle beam apparatus

Method of detecting inclination of a specimen and a projection expo...

Projection type exposure method and apparatus

Method of and apparatus for detecting defect on photomask

Monochromator

Method of forming pattern and projection aligner for carrying out t...

Spectrometer

Method of forming pattern and projection aligner for carrying out t...

Method of forming pattern and projection aligner for carrying out t...

Optical projection printing apparatus wherein wafer mark has a grat...

Pattern printing method and apparatus

Pattern detector

Pattern detector

Pattern generator

Pattern forming apparatus

Automatic focusing apparatus

Pattern detecting apparatus

Reduction projection aligner system

Proportional linear output system

Patents Applicationslast 30 patents

Defect Image Classifying Method and Apparatus and a Semiconductor D...

Method for inspecting defect and system therefor

Defect image classifying method and apparatus and a semiconductor d...

Method for inspecting defect and system therefor

Method and apparatus for reviewing defects

Method for inspecting defect and system therefor

ELECTRON MICROSCOPE INCLUDING APPARATUS FOR X-RAY ANALYSIS AND METH...

Method for inspecting defect and system therefor

Method for classifying defects and device for the same