Toshifumi Ishida

Person

Nirasaki-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Edge ring and etching apparatus
- Patent number 11,887,822
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Toshifumi Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,538,669
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Toshifumi Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing gas diffusing and supplying unit and substrate processin...
- Patent number 9,484,213
- Issue date Nov 1, 2016
- Tokyo Electron Limited
- Toshifumi Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling block forming electrode
- Patent number 9,210,791
- Issue date Dec 8, 2015
- Tokyo Electron Limited
- Toshifumi Ishida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cover part, process gas diffusing and supplying unit, and substrate...
- Patent number 9,177,839
- Issue date Nov 3, 2015
- Tokyo Electron Limited
- Toshifumi Ishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode having gas discharge function and plasma processing appar...
- Patent number 9,082,593
- Issue date Jul 14, 2015
- Tokyo Electron Limited
- Daisuke Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling block forming electrode
- Patent number 8,319,141
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Toshifumi Ishida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220367154
- Publication date Nov 17, 2022
- TOKYO ELECTRON LIMITED
- Masakatsu KASHIWAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING AND ETCHING APPARATUS
- Publication number 20220013338
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Toshifumi ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210335584
- Publication date Oct 28, 2021
- Masakatsu KASHIWAZAKI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210233749
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Toshifumi ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180374687
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Masakatsu KASHIWAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SHUTTER DEVICE AND PLASMA PROCESSIN...
- Publication number 20150187542
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Toshifumi Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING GAS DIFFUSING AND SUPPLYING UNIT AND SUBSTRATE PROCESISN...
- Publication number 20130199729
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Toshifumi Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING BLOCK FORMING ELECTRODE
- Publication number 20130168369
- Publication date Jul 4, 2013
- TOKYO ELECTRON LIMITED
- Toshifumi ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE HAVING GAS DISCHARGE FUNCTION AND PLASMA PROCESSING APPAR...
- Publication number 20120247673
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING BLOCK FORMING ELECTRODE
- Publication number 20110000894
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Toshifumi ISHIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEMPERATURE CONTROL DEVICE, TEMPERATURE CONTROL METHOD, AND SUBSTRA...
- Publication number 20100240154
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Toshifumi Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER PART, PROCESS GAS DIFFUSING AND SUPPLYING UNIT, AND SUBSTRATE...
- Publication number 20090223449
- Publication date Sep 10, 2009
- TOKYO ELECTRON LIMITED
- Toshifumi ISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cooling block forming electrode
- Publication number 20070210037
- Publication date Sep 13, 2007
- Toshifumi Ishida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Upper electrode and plasma processing apparatus
- Publication number 20050000442
- Publication date Jan 6, 2005
- TOKYO ELECTRON LIMITED
- Daisuke Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Toshifumi Ishida

Person

Patents Grantslast 30 patents

Edge ring and etching apparatus

Plasma processing apparatus

Processing gas diffusing and supplying unit and substrate processin...

Cooling block forming electrode

Cover part, process gas diffusing and supplying unit, and substrate...

Electrode having gas discharge function and plasma processing appar...

Cooling block forming electrode

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

EDGE RING AND ETCHING APPARATUS

STAGE AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SHUTTER DEVICE AND PLASMA PROCESSIN...

PROCESSING GAS DIFFUSING AND SUPPLYING UNIT AND SUBSTRATE PROCESISN...

COOLING BLOCK FORMING ELECTRODE

ELECTRODE HAVING GAS DISCHARGE FUNCTION AND PLASMA PROCESSING APPAR...

COOLING BLOCK FORMING ELECTRODE

TEMPERATURE CONTROL DEVICE, TEMPERATURE CONTROL METHOD, AND SUBSTRA...

COVER PART, PROCESS GAS DIFFUSING AND SUPPLYING UNIT, AND SUBSTRATE...

Cooling block forming electrode

Upper electrode and plasma processing apparatus