Toshifumi Nagaiwa

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing method and storage medium
- Patent number 9,059,103
- Issue date Jun 16, 2015
- Tokyo Electron Limited
- Wataru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and apparatus
- Patent number 8,277,673
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Hiroshi Tsujimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20120244720
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Wataru SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20100041240
- Publication date Feb 18, 2010
- TOKYO ELECTRON LIMITED
- Hiroshi TSUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND APPARATUS
- Publication number 20100025372
- Publication date Feb 4, 2010
- TOKYO ELECTON LIMITED
- Hiroshi Tsujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20090242128
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Kenji TAGO
- H01 - BASIC ELECTRIC ELEMENTS