Toshifumi NAGAIWA

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Hsin-chu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Target object processing method and plasma processing apparatus
- Patent number 11,610,766
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Seiji Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 11,342,165
- Issue date May 24, 2022
- Tokyo Electron Limited
- Toshifumi Nagaiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method for controlling radio-freque...
- Patent number 11,264,208
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Toshifumi Nagaiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma etching method
- Patent number 11,171,007
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Toshifumi Nagaiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and plasma processing apparatus
- Patent number 10,991,551
- Issue date Apr 27, 2021
- Tokyo Electron Limited
- Mohd Fairuz Bin Budiman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 10,714,318
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Toshifumi Nagaiwa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200328064
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Mohd Fairuz BIN BUDIMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20200303170
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Toshifumi NAGAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20200286737
- Publication date Sep 10, 2020
- TOKYO ELECTRON LIMITED
- Toshifumi NAGAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING RADIO-FREQUE...
- Publication number 20200266035
- Publication date Aug 20, 2020
- TOKYO ELECTRON LIMITED
- Toshifumi NAGAIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET OBJECT PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200144034
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Seiji Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20190267217
- Publication date Aug 29, 2019
- TOKYO ELECTRON LIMITED
- Toshifumi NAGAIWA
- H01 - BASIC ELECTRIC ELEMENTS