Toshifumi Sohara

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 8,774,491
- Issue date Jul 8, 2014
- Tokyo Electron Limited
- Shinichi Seki
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing system, substrate processing method and comput...
- Patent number 7,676,296
- Issue date Mar 9, 2010
- Tokyo Electron Limited
- Katsuhisa Fujii
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20120257813
- Publication date Oct 11, 2012
- Shinichi SEKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Substrate processing system, substrate processing method and comput...
- Publication number 20070141730
- Publication date Jun 21, 2007
- TOKYO ELECTRON LIMITED
- Katsuhisa Fujii
- G05 - CONTROLLING REGULATING