Toshifumi Tachikawa

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 10,593,519
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Norikazu Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 10,109,461
- Issue date Oct 23, 2018
- Tokyo Electron Limited
- Norikazu Yamada
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,754,768
- Issue date Sep 5, 2017
- Tokyo Electron Limited
- Norikazu Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,734,992
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Norikazu Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,355,822
- Issue date May 31, 2016
- Tokyo Electron Limited
- Norikazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180012736
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Norikazu Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20170372873
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Norikazu Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150000841
- Publication date Jan 1, 2015
- TOKYO ELECTRON LIMITED
- Norikazu Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140361690
- Publication date Dec 11, 2014
- Norikazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20140305905
- Publication date Oct 16, 2014
- Norikazu Yamada
- H01 - BASIC ELECTRIC ELEMENTS