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Toshifumi Yokoyama
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Halftone phase shift photomask and blank for halftone phase shift p...
Patent number
6,869,736
Issue date
Mar 22, 2005
Dai Nippon Printing Co., Ltd.
Hiro-o Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift photomask and blanks for halftone phase shift...
Patent number
6,764,792
Issue date
Jul 20, 2004
Dai Nippon Printing Co., Ltd.
Junji Fujikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask
Patent number
6,740,455
Issue date
May 25, 2004
Dainippon Printing Co., Ltd.
Kenji Noguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Halftone phase shift photomask and blank for halftone phase shift p...
Patent number
6,599,667
Issue date
Jul 29, 2003
Dai Nippon Printing Co., Ltd.
Satoshi Yusa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Blank for halftone phase shift photomask and halftone phase shift p...
Patent number
6,458,496
Issue date
Oct 1, 2002
Dai Nippon Printing Co., Ltd.
Toshiaki Motonaga
B32 - LAYERED PRODUCTS
Information
Patent Grant
Phase shift mask and method of producing the same
Patent number
5,972,543
Issue date
Oct 26, 1999
Dai Nippon Printing Co., Ltd.
Toshifumi Yokoyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift mask and method of producing the same
Patent number
5,811,208
Issue date
Sep 22, 1998
Dai Nippon Printing Co., Ltd.
Toshifumi Yokoyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift photomask and phase shift photomask dry etching method
Patent number
5,723,234
Issue date
Mar 3, 1998
Dai Nippon Printing Co., Ltd.
Toshifumi Yokoyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Halftone phase shift photomask and blank for halftone phase shift p...
Publication number
20030186135
Publication date
Oct 2, 2003
Hiro-o Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask
Publication number
20020119379
Publication date
Aug 29, 2002
Kenji Noguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Halftone phase shift photomask and blank for halftone phase shift p...
Publication number
20020039689
Publication date
Apr 4, 2002
Satoshi Yusa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Blank for halftone phase shift photomask and halftone phase shift p...
Publication number
20010005564
Publication date
Jun 28, 2001
Toshiaki Motonaga
B32 - LAYERED PRODUCTS