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Toshihara Eurakawa
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Essex Junction, VT, US
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last 30 patents
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Patent Grant
Method and system for forming an oxynitride layer
Patent number
7,501,352
Issue date
Mar 10, 2009
Tokyo Electron, Ltd.
Masanobu Igeta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Method and system for forming an oxynitride layer
Publication number
20060228902
Publication date
Oct 12, 2006
Masanobu Igeta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...