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Toshihara Furukawa
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Essex Junction, VT, US
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Patents Grants
last 30 patents
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Patent Grant
Formation of ultra-thin oxide layers by self-limiting interfacial o...
Patent number
7,235,440
Issue date
Jun 26, 2007
Tokyo Electron Limited
David L O'Meara
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of forming uniform ultra-thin oxynitride layers
Patent number
7,202,186
Issue date
Apr 10, 2007
Tokyo Electron Limited
David L O'Meara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Formation of ultra-thin oxide layers by self-limiting interfacial o...
Publication number
20050026453
Publication date
Feb 3, 2005
TOKYO ELECTRON LIMITED
David L. O'Meara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming uniform ultra-thin oxynitride layers
Publication number
20050026459
Publication date
Feb 3, 2005
TOKYO ELECTRON LIMITED
David L. O'Meara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...