Toshiharu Hirata

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method, film forming apparatus, and program
- Patent number 12,094,700
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 12,062,559
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus, substrate transfer method, a...
- Patent number 11,908,712
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate transfer method
- Patent number 11,127,615
- Issue date Sep 21, 2021
- Tokyo Electron Limited
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,086,286
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Toshiharu Hirata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,468,237
- Issue date Nov 5, 2019
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming system
- Patent number 10,273,571
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Yasunobu Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,049,860
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and process status checking method
- Patent number 9,708,711
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and valve operation checking method
- Patent number 8,834,631
- Issue date Sep 16, 2014
- Tokyo Electron Limited
- Katsuhito Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...
- Publication number 20240213064
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Minoru NAGASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHO...
- Publication number 20230026807
- Publication date Jan 26, 2023
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBST...
- Publication number 20220199377
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20220148898
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SUBSTRATE TRANSFER METHOD, A...
- Publication number 20220093425
- Publication date Mar 24, 2022
- TOKYO ELECTRON LIMITED
- Toshiharu Hirata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND PROGRAM
- Publication number 20220074044
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20200012254
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
- Publication number 20200013654
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180315585
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING SYSTEM
- Publication number 20170159170
- Publication date Jun 8, 2017
- Yasunobu SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150235815
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESS STATUS CHECKING METHOD
- Publication number 20130186332
- Publication date Jul 25, 2013
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND VALVE OPERATION CHECKING METHOD
- Publication number 20130183443
- Publication date Jul 18, 2013
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20120014768
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Tetsuya MIYASHITA
- H01 - BASIC ELECTRIC ELEMENTS

Toshiharu Hirata

Person

Patents Grantslast 30 patents

Film forming method, film forming apparatus, and program

Substrate processing system, substrate processing method, and contr...

Semiconductor manufacturing apparatus, substrate transfer method, a...

Substrate processing system and substrate transfer method

Substrate processing system, substrate processing method, and contr...

Substrate processing apparatus

Film forming system

Substrate processing apparatus

Processing apparatus and process status checking method

Processing apparatus and valve operation checking method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...

SEMICONDUCTOR MANUFACTURING APPARATUS, CONDITION COMPENSATION METHO...

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBST...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...

SEMICONDUCTOR MANUFACTURING APPARATUS, SUBSTRATE TRANSFER METHOD, A...

FILM FORMING METHOD, FILM FORMING APPARATUS, AND PROGRAM

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS

FILM FORMING SYSTEM

SUBSTRATE PROCESSING APPARATUS

PROCESSING APPARATUS AND PROCESS STATUS CHECKING METHOD

PROCESSING APPARATUS AND VALVE OPERATION CHECKING METHOD

VACUUM PROCESSING APPARATUS