Membership
Tour
Register
Log in
Toshiharu Matsuzawa
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of forming pattern and projection aligner for carrying out t...
Patent number
4,904,569
Issue date
Feb 27, 1990
Hitachi, Ltd.
Hiroshi Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring resist pattern
Patent number
4,670,650
Issue date
Jun 2, 1987
Hitachi, Ltd.
Toshiharu Matsuzawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a microscopic pattern with far UV pattern exposur...
Patent number
4,614,706
Issue date
Sep 30, 1986
Hitachi, Ltd.
Toshiharu Matsuzawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a microscopic pattern
Patent number
4,536,421
Issue date
Aug 20, 1985
Hitachi, Ltd.
Toshiharu Matsuzawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY