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Method for forming poly-silicon film
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Patent number 7,923,357
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Issue date Apr 12, 2011
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Tokyo Electron Limited
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Mitsuhiro Okada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vertical processing unit
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Patent number 6,110,286
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Issue date Aug 29, 2000
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Tokyo Electron Limited
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Seungho Oh
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C30 - CRYSTAL GROWTH
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Method for forming silicon film
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Patent number 5,677,235
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Issue date Oct 14, 1997
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Tokyo Electron Limited
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Kazuhide Hasebe
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film-forming apparatus
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Patent number 5,622,566
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Issue date Apr 22, 1997
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Tokyo Electron Limited
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Atsushi Hosaka
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of cleaning reaction tube
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Patent number 5,380,370
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Issue date Jan 10, 1995
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Tokyo Electron Limited
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Reiji Niino
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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