Toshihide Hayashi

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus and method
- Patent number 8,517,035
- Issue date Aug 27, 2013
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Grant
Apparatus and method for photoresist removal processing
- Patent number 8,141,567
- Issue date Mar 27, 2012
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PHOTORESIST REMOVAL PROCESSING
- Publication number 20070277853
- Publication date Dec 6, 2007
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND METHOD
- Publication number 20070256711
- Publication date Nov 8, 2007
- Toshihide HAYASHI
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR PHOTORESIST REMOVAL PROCESSING
- Publication number 20070246085
- Publication date Oct 25, 2007
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING
Information Patent Application
PROCESSING APPARATUS AND METHOD
- Publication number 20070246097
- Publication date Oct 25, 2007
- Kabushiki Kaisha Toshiba
- Takahiko Wakatsuki
- B08 - CLEANING