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Hidaka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Optical axis adjustment device and exposure apparatus using the same
Patent number
7,839,488
Issue date
Nov 23, 2010
Dai Nippon Printing Co., Ltd.
Yoshinori Tabata
G02 - OPTICS
Information
Patent Grant
Optical axis adjustment device and exposure apparatus using the same
Patent number
7,372,546
Issue date
May 13, 2008
Dai Nippon Printing Co., Ltd.
Yoshinori Tabata
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Optical axis adjustment device and exposure apparatus using the same
Publication number
20080297750
Publication date
Dec 4, 2008
DAI NIPPON PRINTING CO. , LTD.
Yoshinori Tabata
G02 - OPTICS
Information
Patent Application
Optical axis adjustment device and exposure apparatus using the same
Publication number
20060072092
Publication date
Apr 6, 2006
DAI NIPPON PRINTING CO. , LTD.
Yoshinori Tabata
G02 - OPTICS