Toshihide KAWACHI

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Patents Grantslast 30 patents

Information Patent Grant
Wafer lithography equipment
- Patent number 9,760,017
- Issue date Sep 12, 2017
- TOSHIBA MEMORY CORPORATION
- Kazufumi Shiozawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
WAFER LITHOGRAPHY EQUIPMENT
- Publication number 20160274470
- Publication date Sep 22, 2016
- KABUSHIKI KAISHA TOSHIBA
- Kazufumi SHIOZAWA
- H01 - BASIC ELECTRIC ELEMENTS