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Toshihide Kawachi
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Hyogo, JP
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last 30 patents
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Patent Grant
Photomask, semiconductor device, and method for exposing through ph...
Patent number
6,617,080
Issue date
Sep 9, 2003
Mitsubishi Denki Kabushiki Kaisha
Toshihide Kawachi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Reticle, pattern transferred thereby, and correction method
Patent number
5,868,560
Issue date
Feb 9, 1999
Mitsubishi Denki Kabushiki Kaisha
Naohisa Tamada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY