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Toshihide Kikuchi
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Tokyo, JP
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last 30 patents
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Patent Grant
Linear motor device, stage device, and exposure apparatus
Patent number
6,590,355
Issue date
Jul 8, 2003
Nikon Corporation
Toshihide Kikuchi
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrical coil assembly having a plurality of coils arranged in pairs
Patent number
6,121,867
Issue date
Sep 19, 2000
Nikon Corporation
Yutaka Uda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrical coil assembly having a plurality of coils arranged in pairs
Patent number
6,002,320
Issue date
Dec 14, 1999
Nikon Corporation
Yutaka Uda
H01 - BASIC ELECTRIC ELEMENTS