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Toshihide Ohgata
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Tokyo, JP
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last 30 patents
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Patent Grant
Process for dry etching of aluminum and its alloy
Patent number
4,511,429
Issue date
Apr 16, 1985
Hitachi, Ltd.
Tatsumi Mizutani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...