Toshihide TAKASHIMA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,685,169
- Issue date Apr 1, 2014
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20110126860
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- H01 - BASIC ELECTRIC ELEMENTS