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Toshihide TAKEO
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Koshi City, JP
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last 30 patents
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Patent Grant
Process liquid feed mechanism
Patent number
8,511,331
Issue date
Aug 20, 2013
Tokyo Electron Limited
Tsunenaga Nakashima
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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last 30 patents
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Patent Application
PROCESS LIQUID FEED MECHANISM
Publication number
20110265896
Publication date
Nov 3, 2011
TOKYO ELECTRON LIMITED
Tsunenaga NAKASHIMA
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC