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Patents Grantslast 30 patents

Information Patent Grant
Process liquid feed mechanism
- Patent number 8,511,331
- Issue date Aug 20, 2013
- Tokyo Electron Limited
- Tsunenaga Nakashima
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS LIQUID FEED MECHANISM
- Publication number 20110265896
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Tsunenaga NAKASHIMA
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC