Toshihiko IIJIMA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing device group controller, manufacturing process system, p...
- Patent number 10,108,162
- Issue date Oct 23, 2018
- Tokyo Electron Limited
- Taku Mizutani
- G05 - CONTROLLING REGULATING
Information Patent Grant
Modifying operational efficiency by repositioning process apparatus
- Patent number 10,012,980
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Taku Mizutani
- G05 - CONTROLLING REGULATING
Information Patent Grant
Processing instructing device, processing instructing method, compu...
- Patent number 9,696,711
- Issue date Jul 4, 2017
- Tokyo Electron Limited
- Teruo Asakawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer chuck inclination correcting method and probe apparatus
- Patent number 8,866,503
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Kazunari Ishii
- G01 - MEASURING TESTING
Information Patent Grant
Pre-alignment method of semiconductor wafer and computer-readable r...
- Patent number 8,319,510
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Kazuhito Ogino
- G01 - MEASURING TESTING
Information Patent Grant
Substrate transfer system, substrate transfer apparatus and storage...
- Patent number 8,121,723
- Issue date Feb 21, 2012
- Tokyo Electron Limited
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system and transfer method of object to be processed
- Patent number 7,826,918
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Toshihiko Iijima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate transfer apparatus and method, and storage medium
- Patent number 7,458,469
- Issue date Dec 2, 2008
- Tokyo Electron Limited
- Hiroki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance method for transporting objects
- Patent number 7,457,680
- Issue date Nov 25, 2008
- Tokyo Electron Limited
- Shuji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Work convey system, unmanned convey vehicle system, unmanned convey...
- Patent number 7,283,890
- Issue date Oct 16, 2007
- Tokyo Electron Limited
- Toshihiko Iijima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer cassette
- Patent number 6,874,638
- Issue date Apr 5, 2005
- Tokyo Electron Limited
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer prober system
- Patent number 5,892,686
- Issue date Apr 6, 1999
- Tokyo Electron Limited
- Toshihiko Iijima
- G01 - MEASURING TESTING
Information Patent Grant
Probe device and method of controlling the same
- Patent number 5,034,684
- Issue date Jul 23, 1991
- Tokyo Electron Limited
- Kazuo Mitsui
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPU...
- Publication number 20140358271
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Teruo Asakawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PRODUCTION PROCESSING SYSTEM, PRODUCTION EFFICIENCY IMPROVEMENT DEV...
- Publication number 20140297017
- Publication date Oct 2, 2014
- Taku MIZUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING DEVICE GROUP CONTROLLER, MANUFACTURING PROCESS SYSTEM, P...
- Publication number 20140257546
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Taku MIZUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK INCLINATION CORRECTING METHOD AND PROBE APPARATUS
- Publication number 20110234247
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Kazunari ISHII
- G01 - MEASURING TESTING
Information Patent Application
PRE-ALIGNMENT METHOD OF SEMICONDUCTOR WAFER AND COMPUTER-READABLE R...
- Publication number 20100321052
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Kazuhito OGINO
- G01 - MEASURING TESTING
Information Patent Application
CONVEYANCE METHOD FOR TRANSPORTING OBJECTS
- Publication number 20070150085
- Publication date Jun 28, 2007
- Shuji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transfer system, substrate transfer apparatus and storage...
- Publication number 20070062446
- Publication date Mar 22, 2007
- TOKYO ELECTON LIMITED
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transfer apparatus and method, and storage medium
- Publication number 20070031222
- Publication date Feb 8, 2007
- TOKYO ELECTRON LIMITED
- Hiroki Hosaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer system and transfer method of object to be processed
- Publication number 20060152211
- Publication date Jul 13, 2006
- TOKYO ELECTRON LIMITED
- Toshihiko Iijima
- G05 - CONTROLLING REGULATING
Information Patent Application
Conveyance system, conveyance method and vacuum holding apparatus f...
- Publication number 20050209725
- Publication date Sep 22, 2005
- Shuji Akiyama
- G05 - CONTROLLING REGULATING
Information Patent Application
Work convey system, unmanned coney vehicle system, unmanned convey...
- Publication number 20040234362
- Publication date Nov 25, 2004
- Toshihiko Iijima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Conveyance system, conveyance method and vacuum holding apparatus f...
- Publication number 20040046545
- Publication date Mar 11, 2004
- Shuji Akiyama
- G05 - CONTROLLING REGULATING
Information Patent Application
Wafer cassette
- Publication number 20030122146
- Publication date Jul 3, 2003
- Toshihiko Iijima
- H01 - BASIC ELECTRIC ELEMENTS

Toshihiko IIJIMA

Person

Patents Grantslast 30 patents

Processing device group controller, manufacturing process system, p...

Modifying operational efficiency by repositioning process apparatus

Processing instructing device, processing instructing method, compu...

Wafer chuck inclination correcting method and probe apparatus

Pre-alignment method of semiconductor wafer and computer-readable r...

Substrate transfer system, substrate transfer apparatus and storage...

Transfer system and transfer method of object to be processed

Substrate transfer apparatus and method, and storage medium

Conveyance method for transporting objects

Work convey system, unmanned convey vehicle system, unmanned convey...

Wafer cassette

Wafer prober system

Probe device and method of controlling the same

Patents Applicationslast 30 patents

PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPU...

PRODUCTION PROCESSING SYSTEM, PRODUCTION EFFICIENCY IMPROVEMENT DEV...

PROCESSING DEVICE GROUP CONTROLLER, MANUFACTURING PROCESS SYSTEM, P...

WAFER CHUCK INCLINATION CORRECTING METHOD AND PROBE APPARATUS

PRE-ALIGNMENT METHOD OF SEMICONDUCTOR WAFER AND COMPUTER-READABLE R...

CONVEYANCE METHOD FOR TRANSPORTING OBJECTS

Substrate transfer system, substrate transfer apparatus and storage...

Substrate transfer apparatus and method, and storage medium

Transfer system and transfer method of object to be processed

Conveyance system, conveyance method and vacuum holding apparatus f...

Work convey system, unmanned coney vehicle system, unmanned convey...

Conveyance system, conveyance method and vacuum holding apparatus f...

Wafer cassette