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Toshihiko Imai
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Fukushima, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Automatic localized substrate analysis device and analysis method
Patent number
10,151,727
Issue date
Dec 11, 2018
IAS, INC
Katsuhiko Kawabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of and apparatus for measuring and estimating the cleanlines...
Patent number
5,793,833
Issue date
Aug 11, 1998
Shin-Etsu Handotai Co., Ltd.
Toshihiko Imai
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
AUTOMATIC LOCALIZED SUBSTRATE ANALYSIS DEVICE AND ANALYSIS METHOD
Publication number
20170160233
Publication date
Jun 8, 2017
IAS Inc.
Katsuhiko Kawabata
G01 - MEASURING TESTING
Information
Patent Application
Method for Producing Polishing Agent, Polishing Agent Produced Ther...
Publication number
20080125016
Publication date
May 29, 2008
Shin-Etsu Handotai Co., Ltd.
Mikio Nakamura
B24 - GRINDING POLISHING
Information
Patent Application
Silicon single crystal, a silicon wafer, an apparatus for producing...
Publication number
20070158653
Publication date
Jul 12, 2007
Shin-Etsu Handotai Co., Ltd.
Makoto Iida
C30 - CRYSTAL GROWTH