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Toshihiko Iwao
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Cyclic low temperature film growth processes
Patent number
12,176,204
Issue date
Dec 24, 2024
Tokyo Electron Limited
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hard mask deposition using direct current superimposed radio freque...
Patent number
11,773,484
Issue date
Oct 3, 2023
Tokyo Electron Limited
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclic low temperature film growth processes
Patent number
11,605,536
Issue date
Mar 14, 2023
Tokyo Electron Limited
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
11,139,147
Issue date
Oct 5, 2021
Tokyo Electron Limited
Toshihiko Iwao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ALD PROCESS WITH PLASMA TREATMENT
Publication number
20240203706
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20230295797
Publication date
Sep 21, 2023
Tokyo Electron Limited
Nobuo MATSUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cyclic Low Temperature Film Growth Processes
Publication number
20230154745
Publication date
May 18, 2023
Tokyo Electron Limited
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma Enhanced Film Formation Method
Publication number
20230143204
Publication date
May 11, 2023
TOKYO ELECTRON LIMITED
Toshihiko Iwao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20230017876
Publication date
Jan 19, 2023
Tokyo Electron Limited
Toshihiko IWAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CYCLIC LOW TEMPERATURE FILM GROWTH PROCESSES
Publication number
20220093395
Publication date
Mar 24, 2022
TOKYO ELECTRON LIMITED
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Hard Mask Deposition Using Direct Current Superimposed Radio Freque...
Publication number
20210404055
Publication date
Dec 30, 2021
TOKYO ELECTRON LIMITED
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...