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Optical measurement method and device
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Patent number 7,408,635
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Issue date Aug 5, 2008
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National Institute of Advanced Industrial Science and Technology
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Vladimir Pobortchi
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G01 - MEASURING TESTING
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Electron beam resist
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Patent number 6,503,688
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Issue date Jan 7, 2003
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The University of Birmingham
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Jon Andrew Preece
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Ultrafine fabrication method
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Patent number 5,935,454
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Issue date Aug 10, 1999
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Agency of Industrial Science & Technology, Ministry of International Trade &...
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Tetsuya Tada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Relative-displacement measurement method
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Patent number 4,815,850
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Issue date Mar 28, 1989
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Agency of Industrial Science and Technology
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Toshihiko Kanayama
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY