Toshihiko Kikuchi

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Particle collecting apparatus and particle collecting system
- Patent number 10,768,089
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Toshihiko Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and processing system
- Patent number 8,778,205
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Tsuyoshi Ohno
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, optical constant obtaining method,...
- Patent number 8,243,268
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Toshihiko Kikuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method for calculating optical constants and substrate processing s...
- Patent number 7,663,760
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Toshihiko Kikuchi
- G01 - MEASURING TESTING
Information Patent Grant
Polarization analyzing method
- Patent number 6,950,186
- Issue date Sep 27, 2005
- Tokyo Electron Limited
- Toshihiko Kikuchi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ETCHING PROCESSING APPARATUS, QUARTZ MEMBER AND PLASMA PROCESSING M...
- Publication number 20220020596
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Toshihiko KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE COLLECTING APPARATUS, PARTICLE COLLECTING METHOD, AND PART...
- Publication number 20180095021
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Toshihiko KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
Processing method and processing system
- Publication number 20100133231
- Publication date Jun 3, 2010
- TOKYO ELECTRON LIMITED
- Tsuyoshi Ohno
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, OPTICAL CONSTANT OBTAINING METHOD,...
- Publication number 20100045981
- Publication date Feb 25, 2010
- TOKYO ELECTRON LIMITED
- Toshihiko KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CALCULATING OPTICAL CONSTANTS AND SUBSTRATE PROCESSING S...
- Publication number 20080297801
- Publication date Dec 4, 2008
- TOKYO ELECTRON LIMITED
- Toshihiko Kikuchi
- G01 - MEASURING TESTING
Information Patent Application
Substrate processing system
- Publication number 20060185793
- Publication date Aug 24, 2006
- TOKYO ELECTRON LIMITED
- Yoshihide Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polarization analyzing method
- Publication number 20050007592
- Publication date Jan 13, 2005
- TOKYO ELECTRON LIMITED
- Toshihiko Kikuchi
- G01 - MEASURING TESTING
Information Patent Application
Processing method and processing system
- Publication number 20040260420
- Publication date Dec 23, 2004
- TOKYO ELECTRON LIMITED
- Tsuyoshi Ohno
- G01 - MEASURING TESTING

Toshihiko Kikuchi

Person

Patents Grantslast 30 patents

Particle collecting apparatus and particle collecting system

Processing method and processing system

Substrate processing apparatus, optical constant obtaining method,...

Method for calculating optical constants and substrate processing s...

Polarization analyzing method

Patents Applicationslast 30 patents

ETCHING PROCESSING APPARATUS, QUARTZ MEMBER AND PLASMA PROCESSING M...

PARTICLE COLLECTING APPARATUS, PARTICLE COLLECTING METHOD, AND PART...

Processing method and processing system

SUBSTRATE PROCESSING APPARATUS, OPTICAL CONSTANT OBTAINING METHOD,...

METHOD FOR CALCULATING OPTICAL CONSTANTS AND SUBSTRATE PROCESSING S...

Substrate processing system

Polarization analyzing method

Processing method and processing system