Toshihiko Minami

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for manufacturing semiconductor integrated cir...
- Patent number 8,338,298
- Issue date Dec 25, 2012
- Renesas Electronics Corporation
- Kazuyuki Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber for a chemical vapor deposition apparatus and a ch...
- Patent number 5,425,812
- Issue date Jun 20, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Tsutahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition method, and chemical vapor deposition tre...
- Patent number 5,338,363
- Issue date Aug 16, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Yoshinobu Kawata
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of manufacturing a semiconductor device with a planar interl...
- Patent number 5,077,238
- Issue date Dec 31, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Atsuhiro Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor
- Patent number 4,947,085
- Issue date Aug 7, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Nakanishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for uniformly distributing plasma over a substrate
- Patent number 4,894,510
- Issue date Jan 16, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Koichiro Nakanishi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIR...
- Publication number 20100087064
- Publication date Apr 8, 2010
- Renesas Technology Corp.
- Kazuyuki FUJII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor manufacturing system with exhaust pipe, deposit elimi...
- Publication number 20030094134
- Publication date May 22, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Toshihiko Minami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...