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Toshihiko Nagano
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Koshi-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Abnormality determination system and abnormality determination meth...
Patent number
8,812,266
Issue date
Aug 19, 2014
Tokyo Electron Limited
Naoto Nakamura
G05 - CONTROLLING REGULATING
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Patent Grant
System for processing a plurality of objects contained in a plurali...
Patent number
5,980,591
Issue date
Nov 9, 1999
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Resist processing apparatus having an interface section including t...
Patent number
5,803,932
Issue date
Sep 8, 1998
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ABNORMALITY DETERMINATION SYSTEM AND ABNORMALITY DETERMINATION METH...
Publication number
20130304419
Publication date
Nov 14, 2013
TOKYO ELECTRON LIMITED
Naoto Nakamura
H01 - BASIC ELECTRIC ELEMENTS