Toshihiko Nakata

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning probe microscope and sample observation method using same
- Patent number 9,417,262
- Issue date Aug 16, 2016
- Hitachi, Ltd.
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical inspection method and optical inspection apparatus
- Patent number 9,267,898
- Issue date Feb 23, 2016
- Hitachi, Ltd.
- Kenji Nakahira
- G01 - MEASURING TESTING
Information Patent Grant
Optical filtering device, defect inspection method and apparatus th...
- Patent number 9,182,592
- Issue date Nov 10, 2015
- Hitachi, Ltd.
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Internal defect inspection method and apparatus for the same
- Patent number 9,134,279
- Issue date Sep 15, 2015
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and measurement method using same
- Patent number 9,063,168
- Issue date Jun 23, 2015
- Hitachi, Ltd.
- Takehiro Tachizaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Defect inspection method and apparatus therefor
- Patent number 8,885,037
- Issue date Nov 11, 2014
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Polarizing different phases of interfered light used in a method an...
- Patent number 8,860,946
- Issue date Oct 14, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope
- Patent number 8,844,061
- Issue date Sep 23, 2014
- Hitachi, Ltd.
- Shuichi Baba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of defect inspection and device of defect inspection
- Patent number 8,804,112
- Issue date Aug 12, 2014
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Thermally assisted magnetic recording head inspection method and ap...
- Patent number 8,787,134
- Issue date Jul 22, 2014
- Hitachi High-Technologies Corporation
- Kaifeng Zhang
- G11 - INFORMATION STORAGE
Information Patent Grant
Pattern inspection device of substrate surface and pattern inspecti...
- Patent number 8,736,830
- Issue date May 27, 2014
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cantilever of scanning probe microscope and method for manufacturin...
- Patent number 8,713,710
- Issue date Apr 29, 2014
- Hitachi High-Technologies Corporation
- Kaifeng Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and sample observing method using the same
- Patent number 8,695,110
- Issue date Apr 8, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and device for inspecting for defects
- Patent number 8,670,116
- Issue date Mar 11, 2014
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for measuring displacement of a sample using a...
- Patent number 8,659,761
- Issue date Feb 25, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and surface shape measuring method using...
- Patent number 8,656,509
- Issue date Feb 18, 2014
- Hitachi, Ltd.
- Masahiro Watanabe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Scanning probe microscope and method of observing sample using the...
- Patent number 8,635,710
- Issue date Jan 21, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 8,634,069
- Issue date Jan 21, 2014
- Hitachi High-Technologies Corporation
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Displacement measurement method and apparatus thereof, stage appara...
- Patent number 8,629,985
- Issue date Jan 14, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and equipment for detecting pattern defect
- Patent number 8,553,214
- Issue date Oct 8, 2013
- Hitachi, Ltd.
- Hiroaki Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Defects inspecting apparatus and defects inspecting method
- Patent number 8,508,727
- Issue date Aug 13, 2013
- Hitachi High-Technologies Corporation
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Thermally assisted magnetic recording head inspection method and ap...
- Patent number 8,483,035
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Kaifeng Zhang
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for detecting defects
- Patent number 8,462,330
- Issue date Jun 11, 2013
- Hitachi High-Technologies Corporation
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 8,451,439
- Issue date May 28, 2013
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and method of observing sample using the...
- Patent number 8,407,811
- Issue date Mar 26, 2013
- Hitachi, Ltd.
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of inspecting a DNA chip and apparatus thereof
- Patent number 8,361,784
- Issue date Jan 29, 2013
- Hitachi, Ltd.
- Yoshitada Oshida
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and a measuring method using the same
- Patent number 8,353,060
- Issue date Jan 8, 2013
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope
- Patent number 8,342,008
- Issue date Jan 1, 2013
- Hitachi, Ltd.
- Shuichi Baba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Displacement measurement method and apparatus thereof, stage appara...
- Patent number 8,284,406
- Issue date Oct 9, 2012
- Hitachi, Ltd.
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope and sample observing method using the same
- Patent number 8,272,068
- Issue date Sep 18, 2012
- Hitachi, Ltd.
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVATION METHOD USING SAME
- Publication number 20150377922
- Publication date Dec 31, 2015
- Hitachi ,Ltd.
- Toshihiko NAKATA
- G01 - MEASURING TESTING
Information Patent Application
Scanning Probe Miscroscope
- Publication number 20150177276
- Publication date Jun 25, 2015
- Hitachi, Ltd
- Takehiro Tachizaki
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20140298548
- Publication date Oct 2, 2014
- Shuichi BABA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Optical Filtering Device, Defect Inspection Method and Apparatus Th...
- Publication number 20140160471
- Publication date Jun 12, 2014
- Taketo Ueno
- G02 - OPTICS
Information Patent Application
Scanning Probe Microscope and Measurement Method Using Same
- Publication number 20140165237
- Publication date Jun 12, 2014
- Hitachi, Ltd.
- Takehiro Tachizaki
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS
- Publication number 20130329227
- Publication date Dec 12, 2013
- Kenji Nakahira
- G01 - MEASURING TESTING
Information Patent Application
THERMALLY ASSISTED MAGNETIC RECORDING HEAD INSPECTION METHOD AND AP...
- Publication number 20130265863
- Publication date Oct 10, 2013
- Kaifeng Zhang
- G11 - INFORMATION STORAGE
Information Patent Application
Scanning Probe Microscope and Surface Shape Measuring Method Using...
- Publication number 20130212749
- Publication date Aug 15, 2013
- HITACHI LTD.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20130205454
- Publication date Aug 8, 2013
- Hitachi, Ltd
- Shuichi BABA
- B82 - NANO-TECHNOLOGY
Information Patent Application
INTERNAL DEFECT INSPECTION METHOD AND APPARATUS FOR THE SAME
- Publication number 20130160552
- Publication date Jun 27, 2013
- Hitachi, Ltd
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR INSPECTING FOR DEFECTS
- Publication number 20130155400
- Publication date Jun 20, 2013
- Toshiyuki Nakao
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME
- Publication number 20130145507
- Publication date Jun 6, 2013
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Application
Cantilever of Scanning Probe Microscope and Method for Manufacturin...
- Publication number 20130097739
- Publication date Apr 18, 2013
- Kaifeng Zhang
- B82 - NANO-TECHNOLOGY
Information Patent Application
Displacement Measurement Method and Apparatus Thereof, Stage Appara...
- Publication number 20120327429
- Publication date Dec 27, 2012
- Toshihiko Nakata
- B82 - NANO-TECHNOLOGY
Information Patent Application
Thermally Assisted Magnetic Recording Head Inspection Method and Ap...
- Publication number 20120307605
- Publication date Dec 6, 2012
- Hitachi High-Technologies Corporation
- Kaifeng Zhang
- G11 - INFORMATION STORAGE
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20120262709
- Publication date Oct 18, 2012
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning Probe Microscope and Method of Observing Sample Using the...
- Publication number 20120204297
- Publication date Aug 9, 2012
- HITACHI, LTD.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
- Publication number 20120194809
- Publication date Aug 2, 2012
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING PATTERN
- Publication number 20120176602
- Publication date Jul 12, 2012
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF DEFECT INSPECTION AND DEVICE OF DEFECT INSPECTION
- Publication number 20120092657
- Publication date Apr 19, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS THEREFOR
- Publication number 20120092484
- Publication date Apr 19, 2012
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Method and Defect Inspection Apparatus
- Publication number 20120092656
- Publication date Apr 19, 2012
- Toshiyuki Nakao
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE TO BE I...
- Publication number 20120062903
- Publication date Mar 15, 2012
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20120019816
- Publication date Jan 26, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION DEVICE OF SUBSTRATE SURFACE AND PATTERN INSPECTI...
- Publication number 20120013890
- Publication date Jan 19, 2012
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Application
DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD
- Publication number 20110310382
- Publication date Dec 22, 2011
- Sachio Uto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FLAT SURFACE INSPECTION APPARATUS
- Publication number 20110242524
- Publication date Oct 6, 2011
- Hitachi, Ltd.
- YUKI SHIMIZU
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING PATTERN
- Publication number 20110170092
- Publication date Jul 14, 2011
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
- Publication number 20110149275
- Publication date Jun 23, 2011
- Hiroyuki Nakano
- G01 - MEASURING TESTING
Information Patent Application
A SCANNING PROBE MICROSCOPE AND A MEASURING METHOD USING THE SAME
- Publication number 20110055982
- Publication date Mar 3, 2011
- Masahiro WATANABE
- G01 - MEASURING TESTING

Toshihiko Nakata

Person

Patents Grantslast 30 patents

Scanning probe microscope and sample observation method using same

Optical inspection method and optical inspection apparatus

Optical filtering device, defect inspection method and apparatus th...

Internal defect inspection method and apparatus for the same

Scanning probe microscope and measurement method using same

Defect inspection method and apparatus therefor

Polarizing different phases of interfered light used in a method an...

Scanning probe microscope

Method of defect inspection and device of defect inspection

Thermally assisted magnetic recording head inspection method and ap...

Pattern inspection device of substrate surface and pattern inspecti...

Cantilever of scanning probe microscope and method for manufacturin...

Scanning probe microscope and sample observing method using the same

Method and device for inspecting for defects

Method and apparatus for measuring displacement of a sample using a...

Scanning probe microscope and surface shape measuring method using...

Scanning probe microscope and method of observing sample using the...

Defect inspection device and defect inspection method

Displacement measurement method and apparatus thereof, stage appara...

Method and equipment for detecting pattern defect

Defects inspecting apparatus and defects inspecting method

Thermally assisted magnetic recording head inspection method and ap...

Method and apparatus for detecting defects

Apparatus and method for inspecting pattern

Scanning probe microscope and method of observing sample using the...

Method of inspecting a DNA chip and apparatus thereof

Scanning probe microscope and a measuring method using the same

Scanning probe microscope

Displacement measurement method and apparatus thereof, stage appara...

Scanning probe microscope and sample observing method using the same

Patents Applicationslast 30 patents

SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVATION METHOD USING SAME

Scanning Probe Miscroscope

SCANNING PROBE MICROSCOPE

Optical Filtering Device, Defect Inspection Method and Apparatus Th...

Scanning Probe Microscope and Measurement Method Using Same

OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS

THERMALLY ASSISTED MAGNETIC RECORDING HEAD INSPECTION METHOD AND AP...

Scanning Probe Microscope and Surface Shape Measuring Method Using...

SCANNING PROBE MICROSCOPE

INTERNAL DEFECT INSPECTION METHOD AND APPARATUS FOR THE SAME

METHOD AND DEVICE FOR INSPECTING FOR DEFECTS

SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME

Cantilever of Scanning Probe Microscope and Method for Manufacturin...

Displacement Measurement Method and Apparatus Thereof, Stage Appara...

Thermally Assisted Magnetic Recording Head Inspection Method and Ap...

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

Scanning Probe Microscope and Method of Observing Sample Using the...

METHOD AND APPARATUS FOR DETECTING DEFECTS

APPARATUS AND METHOD FOR INSPECTING PATTERN

METHOD OF DEFECT INSPECTION AND DEVICE OF DEFECT INSPECTION

DEFECT INSPECTION METHOD AND APPARATUS THEREFOR

Defect Inspection Method and Defect Inspection Apparatus

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE TO BE I...

DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS

PATTERN INSPECTION DEVICE OF SUBSTRATE SURFACE AND PATTERN INSPECTI...

DEFECTS INSPECTING APPARATUS AND DEFECTS INSPECTING METHOD

FLAT SURFACE INSPECTION APPARATUS

APPARATUS AND METHOD FOR INSPECTING PATTERN

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

A SCANNING PROBE MICROSCOPE AND A MEASURING METHOD USING THE SAME