Toshihiko Nishimori

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Insulating film for semiconductor device, process and apparatus for...
- Patent number 8,288,294
- Issue date Oct 16, 2012
- Mitsubishi Heavy Industries, Ltd.
- Hidetaka Kafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier metal film production apparatus, barrier metal film product...
- Patent number 7,977,243
- Issue date Jul 12, 2011
- Canon Anelva Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment method and plasma treatment device
- Patent number 7,972,946
- Issue date Jul 5, 2011
- Mitsubishi Heavy Industries, Ltd.
- Tadashi Shimazu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for production of metal film or the like
- Patent number 7,923,374
- Issue date Apr 12, 2011
- Canon Anelva Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier metal film production method
- Patent number 7,659,209
- Issue date Feb 9, 2010
- Canon Anelva Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interconnection structure
- Patent number 7,262,500
- Issue date Aug 28, 2007
- Phyzchemix Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for production of metal film or the like
- Patent number 7,208,421
- Issue date Apr 24, 2007
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metallic film and apparatus for forming the same
- Patent number 6,656,540
- Issue date Dec 2, 2003
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR LIGHT-EMITTING ELEMENT, PROTECTIVE FILM FOR SEMICONDU...
- Publication number 20130049063
- Publication date Feb 28, 2013
- Mitsubishi Heavy Industries, Ltd.
- Hidetaka Kafuku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR LIGHT-EMITTING ELEMENT, PROTECTIVE FILM OF SEMICONDUC...
- Publication number 20130037850
- Publication date Feb 14, 2013
- Mitsubishi Heavy Industries, Ltd.
- Hidetaka Kafuku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATING FILM FOR SEMICONDUCTOR DEVICE, PROCESS AND APPARATUS FOR...
- Publication number 20110266660
- Publication date Nov 3, 2011
- Mitsubishi Electric Corporation
- Hidetaka Kafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, INSULATING FILM FOR S...
- Publication number 20100181654
- Publication date Jul 22, 2010
- Mitsubishi Heavy Industries, Ltd.
- Toshihito Fujiwara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...
- Publication number 20100124825
- Publication date May 20, 2010
- Canon ANELVA Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...
- Publication number 20100047471
- Publication date Feb 25, 2010
- Canon ANELVA Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE
- Publication number 20100040802
- Publication date Feb 18, 2010
- Canon ANELVA Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE
- Publication number 20090311866
- Publication date Dec 17, 2009
- Canon ANELVA Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE
- Publication number 20090233442
- Publication date Sep 17, 2009
- Canon ANELVA Corporation
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE
- Publication number 20090176380
- Publication date Jul 9, 2009
- Mitsubishi Heavy Industries, Ltd.
- Tadashi Shimazu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR THE FORMATION OF A METAL FILM
- Publication number 20090095425
- Publication date Apr 16, 2009
- PHYZCHEMIX CORPORATION
- Hitoshi SAKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production method
- Publication number 20070272655
- Publication date Nov 29, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20070141274
- Publication date Jun 21, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20070117363
- Publication date May 24, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus
- Publication number 20070107843
- Publication date May 17, 2007
- Mitsubishi Heavy Industries, Ltd.
- Yuichi Kawano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20070087577
- Publication date Apr 19, 2007
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for the formation of a metal film
- Publication number 20060191477
- Publication date Aug 31, 2006
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for the formation of a metal film
- Publication number 20060191481
- Publication date Aug 31, 2006
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for the formation of a metal film
- Publication number 20060177583
- Publication date Aug 10, 2006
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20060054593
- Publication date Mar 16, 2006
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for production of metal film or the like
- Publication number 20050230830
- Publication date Oct 20, 2005
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for production of metal film or the like
- Publication number 20050217579
- Publication date Oct 6, 2005
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for the formation of a metal film
- Publication number 20040091636
- Publication date May 13, 2004
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hexagonal boron nitride film with low dielectric constant, layer di...
- Publication number 20040058199
- Publication date Mar 25, 2004
- MITSUBISHI HEAVY INDUSTRIES LTD.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for production of metal film or the like
- Publication number 20040029384
- Publication date Feb 12, 2004
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier metal film production apparatus, barrier metal film product...
- Publication number 20030091739
- Publication date May 15, 2003
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming metallic film and apparatus for forming the same
- Publication number 20020142572
- Publication date Oct 3, 2002
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hexagonal boron nitride film with low dielectric constant, layer di...
- Publication number 20020000556
- Publication date Jan 3, 2002
- Mitsubishi Heavy Industries, Ltd.
- Hitoshi Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Toshihiko Nishimori

Person

Patents Grantslast 30 patents

Insulating film for semiconductor device, process and apparatus for...

Barrier metal film production apparatus, barrier metal film product...

Plasma treatment method and plasma treatment device

Method and apparatus for production of metal film or the like

Barrier metal film production method

Interconnection structure

Method and apparatus for production of metal film or the like

Method for forming metallic film and apparatus for forming the same

Patents Applicationslast 30 patents

SEMICONDUCTOR LIGHT-EMITTING ELEMENT, PROTECTIVE FILM FOR SEMICONDU...

SEMICONDUCTOR LIGHT-EMITTING ELEMENT, PROTECTIVE FILM OF SEMICONDUC...

INSULATING FILM FOR SEMICONDUCTOR DEVICE, PROCESS AND APPARATUS FOR...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, INSULATING FILM FOR S...

BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...

BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCT...

METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE

METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE

METHOD AND APPARATUS FOR PRODUCTION OF METAL FILM OR THE LIKE

PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE

APPARATUS FOR THE FORMATION OF A METAL FILM

Barrier metal film production method

Barrier metal film production apparatus, barrier metal film product...

Barrier metal film production apparatus, barrier metal film product...

Plasma processing apparatus

Barrier metal film production apparatus, barrier metal film product...

Apparatus for the formation of a metal film

Apparatus for the formation of a metal film

Method for the formation of a metal film

Barrier metal film production apparatus, barrier metal film product...

Method and apparatus for production of metal film or the like

Method and apparatus for production of metal film or the like

Methods and apparatus for the formation of a metal film

Hexagonal boron nitride film with low dielectric constant, layer di...

Method and apparatus for production of metal film or the like

Barrier metal film production apparatus, barrier metal film product...

Method for forming metallic film and apparatus for forming the same

Hexagonal boron nitride film with low dielectric constant, layer di...