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Toshihiko Noguchi
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Hyogo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus capable of evaluating process performance
Patent number
6,929,712
Issue date
Aug 16, 2005
Renesas Technology Corp.
Minoru Hanazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defect inspecting device for substrate to be processed and method o...
Patent number
6,768,542
Issue date
Jul 27, 2004
Renesas Technology Corp.
Hirotoshi Ise
G01 - MEASURING TESTING
Information
Patent Grant
Conveyor, method for conveying a semiconductor wafer, and method fo...
Patent number
6,648,128
Issue date
Nov 18, 2003
Mitsubishi Denki Kabushiki Kaisha
Toshihiro Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor producing apparatus, and wafer vacuum chucking device...
Patent number
5,976,260
Issue date
Nov 2, 1999
Mitsubishi Denki Kabushiki Kaisha
Yoshimi Kinoshita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor producing apparatus comprising wafer vacuum chucking...
Patent number
5,534,073
Issue date
Jul 9, 1996
Mitsubishi Denki Kabushiki Kaisha
Yoshimi Kinoshita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor wafer cleaning apparatus
Patent number
5,196,034
Issue date
Mar 23, 1993
Mitsubishi Denki Kabushiki Kaisha
Toshiki Ono
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Plasma processing apparatus capable of evaluating process performance
Publication number
20030178140
Publication date
Sep 25, 2003
Mitsubishi Denki Kabushiki Kaisha
Minoru Hanazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Defect inspecting device for substrate to be processed and method o...
Publication number
20030053046
Publication date
Mar 20, 2003
Mitsubishi Denki Kabushiki Kaisha
Hirotoshi Ise
G01 - MEASURING TESTING
Information
Patent Application
Conveyor, method for conveying a semiconductor wafer, and method fo...
Publication number
20030042115
Publication date
Mar 6, 2003
Mitsubishi Denki Kabushiki Kaisha
Toshihiro Yamashita
H01 - BASIC ELECTRIC ELEMENTS