Toshihiko Onozuka

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Phase shift mask, method of forming asymmetric pattern, method of m...
- Patent number 9,390,934
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Kazuyuki Kakuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 8,586,447
- Issue date Nov 19, 2013
- Hitachi, Ltd.
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 8,247,902
- Issue date Aug 21, 2012
- Hitachi, Ltd.
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 7,911,055
- Issue date Mar 22, 2011
- Hitachi, Ltd.
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 7,501,347
- Issue date Mar 10, 2009
- Hitachi, Ltd.
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus for the removal of resist
- Patent number 6,040,110
- Issue date Mar 21, 2000
- Nitto Denko Corporation
- Seiichirou Shirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing phase shift masks and a method of manufactu...
- Patent number 5,725,971
- Issue date Mar 10, 1998
- Hitachi, Ltd.
- Noboru Moriuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHASE SHIFT MASK, METHOD OF FORMING ASYMMETRIC PATTERN, METHOD OF M...
- Publication number 20140302679
- Publication date Oct 9, 2014
- Hitachi High-Technologies Corporation
- Kazuyuki Kakuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFRACTION GRATING MANUFACTURING METHOD, SPECTROPHOTOMETER, AND SE...
- Publication number 20140092384
- Publication date Apr 3, 2014
- Hitachi High-Technologies Corporation
- Yoshisada Ebata
- G02 - OPTICS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130244146
- Publication date Sep 19, 2013
- Hitachi, Ltd
- Kazuyuki Kakuta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20120270390
- Publication date Oct 25, 2012
- Hitachi, Ltd
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method of the same
- Publication number 20110140275
- Publication date Jun 16, 2011
- Hitachi, Ltd.
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method of the same
- Publication number 20090142919
- Publication date Jun 4, 2009
- Hitachi, Ltd.
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method of the same
- Publication number 20060281298
- Publication date Dec 14, 2006
- Hitachi, Ltd.
- Junji Noguchi
- H01 - BASIC ELECTRIC ELEMENTS

Toshihiko Onozuka

Person

Patents Grantslast 30 patents

Phase shift mask, method of forming asymmetric pattern, method of m...

Semiconductor device and manufacturing method of the same

Semiconductor device and manufacturing method of the same

Semiconductor device and manufacturing method of the same

Semiconductor device and manufacturing method of the same

Process and apparatus for the removal of resist

Method of manufacturing phase shift masks and a method of manufactu...

Patents Applicationslast 30 patents

PHASE SHIFT MASK, METHOD OF FORMING ASYMMETRIC PATTERN, METHOD OF M...

DIFFRACTION GRATING MANUFACTURING METHOD, SPECTROPHOTOMETER, AND SE...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

Semiconductor device and manufacturing method of the same

Semiconductor device and manufacturing method of the same

Semiconductor device and manufacturing method of the same