Toshihiko Shindo

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Annaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ceramic electrostatic chuck with built-in heater
- Patent number 5,663,865
- Issue date Sep 2, 1997
- Shin-Etsu Chemical Co., Ltd.
- Nobuo Kawada
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER