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Toshihiko Shindo
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of processing target object
Patent number
9,780,037
Issue date
Oct 3, 2017
Tokyo Electron Limited
Kazuya Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
8,287,750
Issue date
Oct 16, 2012
Tokyo Electron Limited
Toshihiko Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device fabricating method, plasma processing system a...
Patent number
8,263,498
Issue date
Sep 11, 2012
Tokyo Electron Limited
Ryukichi Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
7,799,238
Issue date
Sep 21, 2010
Tokyo Electron Limited
Toshihiko Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
7,541,283
Issue date
Jun 2, 2009
Tokyo Electron Limited
Toshihiko Shindo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PROCESSING TARGET OBJECT
Publication number
20170084542
Publication date
Mar 23, 2017
TOKYO ELECTRON LIMITED
Kazuya Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20100112819
Publication date
May 6, 2010
TOKYO ELECTRON LIMITED
Toshihiko Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20090212017
Publication date
Aug 27, 2009
TOKYO ELECTRON LIMITED
Toshihiko Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device fabricating method, plasma processing system a...
Publication number
20080020585
Publication date
Jan 24, 2008
Ryukichi Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method and plasma processing apparatus
Publication number
20050142873
Publication date
Jun 30, 2005
TOKYO ELECTRON LIMITED
Toshihiko Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma ashing method
Publication number
20050106875
Publication date
May 19, 2005
TOKYO ELECTRON LIMITED
Kazuhiro Kubota
H01 - BASIC ELECTRIC ELEMENTS