Toshihiko Takahashi

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat insulation structure at lower end of vertical heat treatment a...
- Patent number 11,424,143
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Koji Yoshii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch CVD method and apparatus for semiconductor process
- Patent number 8,461,059
- Issue date Jun 11, 2013
- Tokyo Electron Limited
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 8,431,494
- Issue date Apr 30, 2013
- Tokyo Electron Limited
- Hiroki Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, control method for substrate processin...
- Patent number 7,953,512
- Issue date May 31, 2011
- Tokyo Electron Limitetd
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and method
- Patent number 6,357,457
- Issue date Mar 19, 2002
- Tokyo Electron Limited
- Hiroki Taniyama
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
HEAT INSULATION STRUCTURE AND VERTICAL HEAT TREATMENT APPARATUS
- Publication number 20190287828
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Koji Yoshii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20110312192
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH CVD METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20110021033
- Publication date Jan 27, 2011
- TOKYO ELECTRON LIMITED
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing system, control method for substrate processin...
- Publication number 20090078197
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Takenaga
- H01 - BASIC ELECTRIC ELEMENTS