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Patents Grants
last 30 patents
Information
Patent Grant
Imaging apparatus
Patent number
9,329,376
Issue date
May 3, 2016
Canon Kabushiki Kaisha
Yoshinari Higaki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Imaging apparatus equipped with illumination optical system having...
Patent number
9,332,166
Issue date
May 3, 2016
Canon Kabushiki Kaisha
Tomoaki Kawakami
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Illumination optical system, exposure apparatus, and method of manu...
Patent number
8,891,062
Issue date
Nov 18, 2014
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical system and exposure apparatus
Patent number
8,284,378
Issue date
Oct 9, 2012
Canon Kabushiki Kaisha
Kazuhiko Kajiyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,035,668
Issue date
Oct 11, 2011
Canon Kabushiki Kaisha
Mitsuro Sugita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
7,714,987
Issue date
May 11, 2010
Canon Kabushiki Kaisha
Kazuhiko Kajiyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical system and exposure apparatus including the same
Patent number
7,538,856
Issue date
May 26, 2009
Canon Kabushiki Kaisha
Kazuhiko Kajiyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system and exposure apparatus
Patent number
7,324,187
Issue date
Jan 29, 2008
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device fabrication method using the same
Patent number
7,274,435
Issue date
Sep 25, 2007
Canon Kabushiki Kaisha
Mitsuru Hiura
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
Patent number
7,265,816
Issue date
Sep 4, 2007
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination apparatus, exposure apparatus and device manufacturing...
Patent number
7,239,375
Issue date
Jul 3, 2007
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination apparatus, exposure apparatus and device manufacturing...
Patent number
7,130,025
Issue date
Oct 31, 2006
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination optical system and exposure apparatus
Patent number
7,110,084
Issue date
Sep 19, 2006
Canon Kabushiki Kaisha
Toshihiko Tsuji
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Illumination optical system and exposure apparatus
Patent number
7,064,806
Issue date
Jun 20, 2006
Canon Kabushiki Kaisha
Toshihiko Tsuji
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Illumination optical system in exposure apparatus
Patent number
7,050,154
Issue date
May 23, 2006
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position detection device, apparatus using the same, exposure appar...
Patent number
6,946,666
Issue date
Sep 20, 2005
Canon Kabushiki Kaisha
Kenji Saito
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Illumination system, projection exposure apparatus and device manuf...
Patent number
6,919,951
Issue date
Jul 19, 2005
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus and device manufacturing method
Patent number
6,885,432
Issue date
Apr 26, 2005
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element with alignment mark, and optical system having such...
Patent number
6,856,392
Issue date
Feb 15, 2005
Canon Kabushiki Kaisha
Toshihiko Tsuji
G02 - OPTICS
Information
Patent Grant
Illumination optical system in exposure apparatus
Patent number
6,816,234
Issue date
Nov 9, 2004
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position detection device, apparatus using the same, exposure appar...
Patent number
6,806,477
Issue date
Oct 19, 2004
Canon Kabushiki Kaisha
Kenji Saito
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Scanning exposure apparatus and device manufacturing method using t...
Patent number
6,753,943
Issue date
Jun 22, 2004
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical unit and optical instrument having the same
Patent number
6,606,195
Issue date
Aug 12, 2003
Canon Kabushiki Kaisha
Toshihiko Tsuji
G02 - OPTICS
Information
Patent Grant
Illumination system and projection exposure apparatus
Patent number
6,392,742
Issue date
May 21, 2002
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system and exposure apparatus having the same
Patent number
6,285,855
Issue date
Sep 4, 2001
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical inspection method and apparatus including intensity modulat...
Patent number
5,861,952
Issue date
Jan 19, 1999
Canon Kabushiki Kaisha
Toshihiko Tsuji
G01 - MEASURING TESTING
Information
Patent Grant
Inspection system and device manufacturing method using the same
Patent number
5,767,962
Issue date
Jun 16, 1998
Canon Kabushiki Kaisha
Masayuki Suzuki
G01 - MEASURING TESTING
Information
Patent Grant
Positional deviation measuring device and method for measuring the...
Patent number
5,751,426
Issue date
May 12, 1998
Canon Kabushiki Kaisha
Noriyuki Nose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for detecting foreign matter on a substrate, and an expos...
Patent number
5,742,386
Issue date
Apr 21, 1998
Canon Kabushiki Kaisha
Noriyuki Nose
G01 - MEASURING TESTING
Information
Patent Grant
Inspection system for original with pellicle
Patent number
5,652,657
Issue date
Jul 29, 1997
Canon Kabushiki Kaisha
Minoru Yoshii
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Image Pickup Apparatus
Publication number
20140160267
Publication date
Jun 12, 2014
Canon Kabushiki Kaisha
Tomoaki Kawakami
G02 - OPTICS
Information
Patent Application
IMAGING APPARATUS
Publication number
20130222569
Publication date
Aug 29, 2013
Tomoaki Kawakami
G02 - OPTICS
Information
Patent Application
MICROSCOPE, IMAGE ACQUISITION APPARATUS, AND IMAGE ACQUISITION SYSTEM
Publication number
20130169788
Publication date
Jul 4, 2013
Canon Kabushiki Kaisha
Toshihiko Tsuji
G02 - OPTICS
Information
Patent Application
IMAGING APPARATUS
Publication number
20130169859
Publication date
Jul 4, 2013
Canon Kabushiki Kaisha
Tomoaki Kawakami
G02 - OPTICS
Information
Patent Application
MICROSCOPE
Publication number
20130162801
Publication date
Jun 27, 2013
Canon Kabushiki Kaisha
Kazuhiko Kajiyama
G02 - OPTICS
Information
Patent Application
IMAGING APPARATUS
Publication number
20120327208
Publication date
Dec 27, 2012
Canon Kabushiki Kaisha
Yoshinari Higaki
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANU...
Publication number
20120170013
Publication date
Jul 5, 2012
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS
Publication number
20100053584
Publication date
Mar 4, 2010
Canon Kabushiki Kaisha
Kazuhiko KAJIYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS INCLUDING THE SAME
Publication number
20090027641
Publication date
Jan 29, 2009
Canon Kabushiki Kaisha
Kazuhiko KAJIYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS
Publication number
20080088814
Publication date
Apr 17, 2008
Canon Kabushiki Kaisha
Kazuhiko KAJIYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...
Publication number
20060250600
Publication date
Nov 9, 2006
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20060158504
Publication date
Jul 20, 2006
Mitsuro Sugita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination optical system, exposure apparatus, and device manufac...
Publication number
20050280794
Publication date
Dec 22, 2005
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method and apparatus
Publication number
20050236584
Publication date
Oct 27, 2005
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination apparatus, exposure apparatus and device manufacturing...
Publication number
20050206871
Publication date
Sep 22, 2005
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination system and exposure apparatus
Publication number
20050110972
Publication date
May 26, 2005
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination optical system and exposure apparatus
Publication number
20050105290
Publication date
May 19, 2005
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination optical system and exposure apparatus
Publication number
20050057737
Publication date
Mar 17, 2005
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination optical system and exposure apparatus
Publication number
20050057738
Publication date
Mar 17, 2005
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection exposure apparatus and device manufacturing method
Publication number
20050030510
Publication date
Feb 10, 2005
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination optical system in exposure apparatus
Publication number
20050030509
Publication date
Feb 10, 2005
Canon Kabushiki Kaisha
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection exposure apparatus and device manufacturing method
Publication number
20040001190
Publication date
Jan 1, 2004
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination system, projection exposure apparatus and device manuf...
Publication number
20030031017
Publication date
Feb 13, 2003
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Scanning exposure apparatus and device manufacturing method using t...
Publication number
20020131032
Publication date
Sep 19, 2002
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL UNIT AND OPTICAL INSTRUMENT HAVING THE SAME
Publication number
20020048085
Publication date
Apr 25, 2002
Toshihiko Tsuji
G02 - OPTICS
Information
Patent Application
Illumination optical system in exposure apparatus
Publication number
20010055107
Publication date
Dec 27, 2001
Toshihiko Tsuji
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION DETECTION DEVICE, APPARATUS USING THE SAME, EXPOSURE APPAR...
Publication number
20010042838
Publication date
Nov 22, 2001
KENJI SAITO
B82 - NANO-TECHNOLOGY