Toshihiko Tsuji

Person

Chiba-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure device, exposure method and device manufacturing method
- Patent number 7,116,396
- Issue date Oct 3, 2006
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure system and method for manufacturing device
- Patent number 7,106,414
- Issue date Sep 12, 2006
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,922,910
- Issue date Aug 2, 2005
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 6,903,799
- Issue date Jun 7, 2005
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,850,327
- Issue date Feb 1, 2005
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminance measurement apparatus, exposure apparatus, and exposure...
- Patent number 6,603,532
- Issue date Aug 5, 2003
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminance meter, illuminance measuring method and exposure apparatus
- Patent number 6,549,277
- Issue date Apr 15, 2003
- Nikon Corporation
- Hiroaki Narushima
- G01 - MEASURING TESTING
Information Patent Grant
Beam output control method, beam output apparatus and exposure syst...
- Patent number 6,542,222
- Issue date Apr 1, 2003
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,525,817
- Issue date Feb 25, 2003
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminance distribution measuring method, exposing method and devi...
- Patent number 6,211,947
- Issue date Apr 3, 2001
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,169,602
- Issue date Jan 2, 2001
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection method and apparatus for projection optical systems
- Patent number 6,151,122
- Issue date Nov 21, 2000
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 6,002,467
- Issue date Dec 14, 1999
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for measuring a quantity of light wit...
- Patent number 5,894,341
- Issue date Apr 13, 1999
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus having function of detecting intensit...
- Patent number 5,798,838
- Issue date Aug 25, 1998
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposing apparatus
- Patent number 5,424,552
- Issue date Jun 13, 1995
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection-type optical apparatus
- Patent number 5,137,349
- Issue date Aug 11, 1992
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20070164234
- Publication date Jul 19, 2007
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure device, exposure method and device manufacturing method
- Publication number 20050140959
- Publication date Jun 30, 2005
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure system and method for manufacturing device
- Publication number 20050140946
- Publication date Jun 30, 2005
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and exposure apparatus
- Publication number 20040141164
- Publication date Jul 22, 2004
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus
- Publication number 20040055177
- Publication date Mar 25, 2004
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20030081191
- Publication date May 1, 2003
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection method and apparatus for projection optical systems
- Publication number 20030025908
- Publication date Feb 6, 2003
- Nikon Corporation
- Tetsuo Taniguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Irradiance photometer and exposure apparatus
- Publication number 20020101574
- Publication date Aug 1, 2002
- NIKON CORPORATION
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illuminance measurement apparatus, exposure apparatus, and exposure...
- Publication number 20020048007
- Publication date Apr 25, 2002
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Toshihiko Tsuji

Person

Patents Grantslast 30 patents

Exposure device, exposure method and device manufacturing method

Exposure system and method for manufacturing device

Exposure apparatus

Exposure method and exposure apparatus

Inspection method and apparatus for projection optical systems

Illuminance measurement apparatus, exposure apparatus, and exposure...

Illuminance meter, illuminance measuring method and exposure apparatus

Beam output control method, beam output apparatus and exposure syst...

Inspection method and apparatus for projection optical systems

Illuminance distribution measuring method, exposing method and devi...

Inspection method and apparatus for projection optical systems

Inspection method and apparatus for projection optical systems

Exposure apparatus and method

Exposure apparatus and method for measuring a quantity of light wit...

Projection exposure apparatus having function of detecting intensit...

Projection exposing apparatus

Projection-type optical apparatus

Patents Applicationslast 30 patents

Exposure apparatus and device manufacturing method

Exposure device, exposure method and device manufacturing method

Exposure system and method for manufacturing device

Exposure method and exposure apparatus

Exposure Apparatus

Exposure apparatus and method

Inspection method and apparatus for projection optical systems

Irradiance photometer and exposure apparatus

Illuminance measurement apparatus, exposure apparatus, and exposure...